Applications of a fiber coupled chromatic confocal sensor in nanopositioning and nanomeasuring machines :
Anwendungen eines fasergekoppelten chromatisch konfokalen Sensors in Nanopositionier- und Nanomessmaschinen. - In: Technisches Messen, ISSN 2196-7113, Bd. 86 (2019), S. S17-S21
https://doi.org/10.1515/teme-2019-0041
Influences on the measurement with pipe clamp thermometers :
Einflussfaktoren auf die Messung mit Rohranlegethermometern. - In: Technisches Messen, ISSN 2196-7113, Bd. 86 (2019), S. S67-S71
https://doi.org/10.1515/teme-2019-0033
In situ error measurement of serial rotational devices for the application in nano coordinate measuring machines :
In-situ-Messung von Bewegungsabweichungen serieller Rotationsachsen zur Anwendung in Nanomessmaschinen. - In: Technisches Messen, ISSN 2196-7113, Bd. 86 (2019), S. S77-S81
https://doi.org/10.1515/teme-2019-0040
Photon momentum induced precision small forces: a static and dynamic check. - In: Measurement science and technology, ISSN 1361-6501, Volume 30 (2019), number 10, 105004, Seite 1-11
Practical means of generation and calibration of the small precision forces in static and dynamic regimes around 1 Hz by the usage of radiation pressure effect from 1 W continuous wave visible (diode) laser light is presented. The additive effect of the transfer of photon momentum, caused by non-overlapping multiply reflecting laser beam locked within a quasi-passive and/or active macroscopic cavity system, is employed. The effective laser power (partially trapped experimentally) is amplified, such that the optically generated forces are increased from hundreds of pN to sub-N level. The results presented in this paper should be seen as a means for extending the edge of practically verifiable lower limits of SI-traceable force metrology.
https://doi.org/10.1088/1361-6501/ab257e
On the development and qualification of multiaxial designs of nanofabrication machines with ultra precision tool rotations. - In: Proceedings of the 19th International Conference of the European Society for Precision Engineering and Nanotechnology, (2019), S. 68-69
The majority of nanopositioning and nanomeasuring machines (NPMMs) are based on three independent linear movements in a Cartesian coordinate system with a repeatability in the nanometer range. This in combination with the specific nature of sensors and tools limits the addressable part geometries. This article contributes to the enhancement of multiaxial machine structures by the implementation of rotational movements while keeping the precision untouched. A parameter based dynamic evaluation system with quantifiable technological parameters has been set up and employed to identify general solution concepts and adequate substructures. It further on contains data based on comprehensive design catalogues, uncertainty calculations and CAD-model based footprint analysis for specific setups. First evaluations show high potential for sample scanning mode variants considering linear movements of the object in combination with angular movements of the tool, considering a goniometer setup in specific. Based on this, positioning systems for the tool rotation of a NPMM were selected and the positioning properties of different arrangements were determined in test series using autocollimators. General properties of the influence of the arrangement were derived. The arrangement of the substructures which fulfils the previous given requirements is integrated into the NPMM and investigated for long-term stability using a retroreflector as a tool and various laser interferometers. The influence of the additional positioning systems on the existing structure of NPMMs are investigated and solutions for the optimization of the overall system with regard to reproducibility and long-term stability are developed. For this purpose, comprehensive FEA simulations are carried out and structural adjustments are derived via topology optimizations. After all, the knowledge gained is formed into general rules for the verification and optimization of design solutions for multiaxial nanopositioning machines.
Mechanical properties of an adjustable weighing cell. - In: Proceedings of the 19th International Conference of the European Society for Precision Engineering and Nanotechnology, (2019), S. 86-89
Charakterisierung elektrischer Kontakt-Entladungen im Bereich niedriger Spannungen im Zündgrenz-Bereich von Wasserstoff-Luft-Gemisch. - Ilmenau : Universitätsbibliothek, 2019. - 1 Online-Ressource (VI, 101 Seiten)
Technische Universität Ilmenau, Dissertation 2019
Elektrische Entladungen, die bei schaltenden elektrischen Kontakten oder beim Ziehen einer Steckverbindung unter Spannung entstehen können, sind eine bedeutende Zündquelle in explosionsfähigen Atmosphären. Elektrische Komponenten in solchen Atmosphären entsprechen daher einem Zündschutzkonzept wie beispielsweise der Eigensicherheit "i". Hierbei werden durch definierte Begrenzung von elektrischen Parametern Zündungen verhindert. Das wird nach dem Stand der Technik mit dem IEC-Funkenprüfgerät getestet, indem mit der Energie der Testkomponente elektrische Entladungen in einem explosionsfähigen Gasgemisch erzeugt werden. Die komplexen Phänomene der auftretenden Entladungstypen sind jedoch bis heute noch nicht vollständig verstanden. Die Ergebnisse der Prüfgeräte streuen stark und können zu Wettbewerbsverzerrungen führen. Zum Erreichen reproduzierbarer Ergebnisse ist es daher notwendig, eine verbesserte alternative Prüfmethode zu entwickeln. Diese soll die für die Zündung relevante elektrische Entladung nachbilden. Das Ziel ist, die Zündgrenzwerte durch diese Prüfmethode möglichst einfach und reproduzierbar bestimmen zu können. Dies wird durch einen Lösungsansatz erreicht, der auf der Verwendung der Zündgrenzwerte basiert, wie sie sich im IEC-Funkenprüfgerät bei einer definierten Zündwahrscheinlichkeit unter Worst-Case-Bedingungen ergeben. Hierzu wird eine spezielle Kontaktvorrichtung verwendet, mit der diese Entladungen unter Worst-Case-Bedingungen gezielt erzeugt werden. Die Untersuchungen umfassen daher die Ermittlung der Worst-Case-Bedingungen und die Charakterisierung der Entladungen bei Öffnungsvorgängen in einem Wasserstoff-Luft-Gemisch mit Stromwerten kleiner als 60 mA und einer maximalen Spannung von 30 VDC. Dabei werden die Strom-Spannungs-Kennlinie, das optische Spektrum, eine Abschätzung der Temperatur und eine vereinfachte Bewertung der Zündfähigkeit über den Leistungsverlauf einschließlich der Abschätzung der Messunsicherheit dargestellt. Die Nachbildung orientiert sich an der Physik der Entladung, ermöglicht reproduzierbare Ergebnisse und kann in einem Prüfgerät oder einem Programm eingesetzt werden. Die Arbeit bildet eine erste Grundlage für eine alternative Prüfmethode zum bisherigen IEC-Funkenprüfgerät, deren Ergebnisse in die internationale Normung einfließen können.
https://nbn-resolving.org/urn:nbn:de:gbv:ilm1-2019000239
Tilt sensitivity modeling of a monolithic weighing cell structure. - In: Interdisciplinary applications of kinematics, (2019), S. 257-264
Compliant mechanisms for ultra-precise applications. - In: Interdisciplinary applications of kinematics, (2019), S. 249-256
This paper reports about enhanced compliant mechanisms with flexure hinge based on new analytic and/or FEM models that have been manufactured by state of the art wire EDM technology. Experimental proofs at test benches, equipped with ultra-precise interferometer based length and angular measurement systems, show first time the residual deviation to the intended path of motion with a resolution of nanometers/arc seconds. Theoretically determined and measured data are in good correlation. Repeatability limitations are rather more given by the residual noise of the overall test arrangement and mainly not by the mechanism itself.
Scale spanning subnanometer metrology up to ten decades. - In: Optical Measurement Systems for Industrial Inspection XI, (2019), S. 110560L-1-110560L-7
Nanometre accuracy and resolution metrology over large areas is becoming more and more a necessity for the progress of precision and especially for nano manufacturing. In recent years, the TU Ilmenau has succeeded in developing the scientific-technical basics of new ultra-high precision, so called nanopositioning and nanomeasuring machines. In further development of the first 25 mm machine, known as NMM-1 from SIOS Meßtechnik GmbH, we have developed and built new machines having measuring ranges of 200 mm x 200 mm x 25 mm at a resolution of 20 pm and enable measuring reproducibility of up to 80 pm. This means a relative resolution of 10 decades. The enormous accuracy is only made possible by the consistent application of error-minimum measurement principles, highly accurate interferometric measurement technology in combination with highly developed measurement signal processing and comprehensive error correction algorithms. The probing of the measurement objects can optionally be carried out with the aid of precision optical, interference-optical, tactile or atomic force sensors. A complex 3D measurement uncertainty model is used for error analysis. The high performance could be demonstrated as an example in step height measurements with a reproducibility of only 73 pm. The achieved resolution of 10-10 also presents new challenges for the frequency stability of the He-Ne lasers used. Here, the approach of direct coupling of the lasers to a phase-stabilized optical frequency comb synchronized with an atomic clock is pursued. The frequency stability is thus limited by the relative stability of the RFreference to better than 4×10-12 (1s).
https://doi.org/10.1117/12.2526076