Ultra precise motion error measurement of rotation kinematics for the integration in nanomeasuring and nanofabrication machines. - In: 33rd ASPE Annual Meeting, ISBN 978-1-887706-77-3, (2018), S. 122-126
The semiconductor industry has been done an incomparable progress during the last 60 years. With the ongoing reduction of the structure size by new fabrication techniques the nanomeasurement systems have also increased their performance [1]. Besides this development the measurement and fabrication of freeform surfaces, aspheric lenses or high aspect ratio structures are still highly challenging. There are different commercial and scientific approaches to measure on freeform surfaces [2, 3, 4, 5].
On modeling the bending stiffness of thin semi-circular flexure hinges for precision applications. - In: Actuators, ISSN 2076-0825, Bd. 7 (2018), 4, 86, S. 1-16
Compliant mechanisms based on flexure hinges are widely used in precision engineering applications. Among those are devices such as precision balances and mass comparators with achievable resolutions and uncertainties in the nano-newton range. The exact knowledge of the mechanical properties of notch hinges and their modeling is essential for the design and the goal-oriented adjustment of these devices. It is shown in this article that many analytical equations available in the literature for calculating the bending stiffness of thin semi-circular flexure hinges cause deviations of up to 12% compared to simulation results based on the three-dimensional finite element model for the considered parameter range. A close examination of the stress state within the loaded hinge reveals possible reasons for this deviation. The article explains this phenomenon in detail and shows the limitations of existing analytical models depending on specific geometric ratios. An accurate determination of the bending stiffness of semi-circular flexure hinges in a wide range of geometric parameters without the need for an elaborate finite element analysis is proposed in form of FEM-based correction factors for analytical equations referring to Euler-Bernoulli's beam theory.
https://doi.org/10.3390/act7040086
Messunsicherheit 2018. - In: Technisches Messen, ISSN 2196-7113, Bd. 85 (2018), 12, S. 713-715
Editorial
https://doi.org/10.1515/teme-2018-0077
Multicomponent force/torque sensor with integrated calibration system. - In: Sensors and Measuring Systems, (2018), S. 189-192
https://ieeexplore.ieee.org/document/8436165
Influence of additional rotational movements on the measurement uncertainty of nanomeasuring, nanopositioning and nanofabrication machines. - In: Sensors and Measuring Systems, (2018), S. 168-171
The measurement of freeform surfaces, aspheric lenses or the sidewall roughness of high aspect ratio structures are a current challenge in nanometrology. There are different publications and commercial products with approaches to perform a measurement of those quantities [1, 2, 3, 4]. Beside the nanomeasurement the nanofabrication on curved freeform surfaces is an upcoming trend. The measurement or the fabrication on a freeform surface is limited by the possible tilt angle between the tools working axis and the local surface normal. To achieve larger angles and a minimal measurement uncertainty the tool must be placed optimal to the local surface. According to those requirements, concepts are developed to increase the degree of freedom in positioning. The x-y-z translational positioning system of an nanomeasuring machine (NMM-1) with a working volume of 25×25×5mm^3 [5] will be extended by additional rotational movements. The rotation can be achieved by three basic principles of motion which are the rotation of the sample, of the tool or a combination of the tool and the sample rotation. In a first step the principles of motion are described by their bare geometrical properties and decoupled from real positioning systems. A constant instantaneous centre of motion in the sensor measurement point is determined as the optimal principle for a rotational system. This principle is further investigated and is made concrete by choosing a combination of kinematics [6]. A vectorial approach based on the GUM [7] is used to evaluate the influence of the axes error motion on the measurement result. The method and the results for a combination of a rotary table and a goniometer axis are described in detail.
https://ieeexplore.ieee.org/document/8436163
Dynamic sensor positioning in large measuring volumes by an inverse kinematic concept. - In: Journal of physics, ISSN 1742-6596, Bd. 1065 (2018), 14, 142009, insges. 4 S.
https://doi.org/10.1088/1742-6596/1065/14/142009
The Planck-Balance - primary mass metrology for industrial applications. - In: Journal of physics, ISSN 1742-6596, Bd. 1065 (2018), 4, 042021, insges. 4 S.
https://doi.org/10.1088/1742-6596/1065/4/042021
Field emission from diamond nanotips for scanning probe lithography. - In: Journal of vacuum science & technology, ISSN 2166-2754, Bd. 36 (2018), 6, 06JL02, insges. 6 S.
https://doi.org/10.1116/1.5048193
Nanonewton force measurements based on electromagnetic force compensated balances (EMFC). - In: CPEM 2018, ISBN 978-1-5386-0974-3, (2018), insges. 2 S.
https://doi.org/10.1109/CPEM.2018.8501174
Multicomponent force and torque measurement in the new SI. - In: CPEM 2018, ISBN 978-1-5386-0974-3, (2018), insges. 2 S.
https://doi.org/10.1109/CPEM.2018.8500809