Flow rate measurement of weakly conducting fluids using Lorentz force velocimetry. - In: Measurement science and technology, ISSN 1361-6501, Bd. 23 (2012), 10, S. 105307, insges. 6 S.
http://dx.doi.org/10.1088/0957-0233/23/10/105307
Multi-sensor approach for multivalent applications in nanometrology. - In: International journal of automation and smart technology, ISSN 2223-9766, Bd. 2 (2012), 2, S. 141-145
The field of nanometrology is subject to increasing complexity as dimensional structures become more intricate with smaller structural widths and increasingly larger surface areas, and with the inclusion of thousands of inspection features. The relevant metrology tools thus need to provide the ability to measure in three dimensions with atomic resolution over large areas, and at a speed/throughput suitable for industrial applications. Ilmenau developed Nanopositioning and Nanomeasuring Technologies with an measuring range of tens of millimeter, subnanometer resolution and nanometer accuracy, allowing for combination with a multi-sensor approach for multivalent measurement and positioning applications in nanometrology.
http://dx.doi.org/10.5875/ausmt.v2i2.149
A multi-sensor approach for complex and large-area applications in micro and nanometrology. - In: Measure, ISSN 1931-5775, Bd. 7 (2012), 2, S. 44-50
In micro and nanotechnology, the metrological demands are increasing. The structures to be measured are becoming more complex with smaller structure widths, increasingly larger surface regions, and thousands of inspection features. In order to solve the problems, it has become desirable and even necessary to combine multi-sensor technology with high precision nanopositioning and nanomeasuring technology. The Nanopositioning and Nanomeasuring Machine NMM-1 with a measuring range of 25 mm x 25 mm x 5 mm and sub-nanometer resolution allows the application of several optical, tactile and atomic force probes. The combination of several sensor technologies in multi-sensor approach for application with the NMM-1 is demonstrated.
Determination of the dynamic behaviour of high-speed temperature sensors. - In: Measurement science and technology, ISSN 1361-6501, Bd. 23 (2012), 7, S. 074024, insges. 9 S.
http://dx.doi.org/10.1088/0957-0233/23/7/074024
Calculation of the effective emissivity of blackbodies made of alumina. - In: Measurement science and technology, ISSN 1361-6501, Bd. 23 (2012), 7, S. 074023, insges. 6 S.
http://dx.doi.org/10.1088/0957-0233/23/7/074023
Mechatronic FEM model of an electromagnetic-force-compensated load cell. - In: Measurement science and technology, ISSN 1361-6501, Bd. 23 (2012), 7, S. 074018, insges. 10 S.
http://dx.doi.org/10.1088/0957-0233/23/7/074018
Force measurement of low forces in combination with high dead loads by the use of electromagnetic force compensation. - In: Measurement science and technology, ISSN 1361-6501, Bd. 23 (2012), 7, S. 074017, insges. 7 S.
http://dx.doi.org/10.1088/0957-0233/23/7/074017
Approaching nanometre accuracy in measurement of the profile deviation of a large plane mirror. - In: Measurement science and technology, ISSN 1361-6501, Bd. 23 (2012), 7, S. 074014, insges. 6 S.
http://dx.doi.org/10.1088/0957-0233/23/7/074014
Fibre-coupled monochromatic zero-point sensor for precision positioning systems using laser interferometers. - In: Measurement science and technology, ISSN 1361-6501, Bd. 23 (2012), 7, S. 074008, insges. 8 S.
http://dx.doi.org/10.1088/0957-0233/23/7/074008
Heterodyne interferometer laser source with a pair of two phase locked loop coupled He-Ne lasers by 632.8 nm. - In: Measurement science and technology, ISSN 1361-6501, Bd. 23 (2012), 7, S. 074006, insges. 6 S.
http://dx.doi.org/10.1088/0957-0233/23/7/074006