Climate chamber for a high temperature stability. - In: Sensor + Test Conference 2011, ISBN 978-3-9810993-9-3, (2011), S. 698-701
Homodyne interference signal demodulation for nanopositioning and nanomeasuring machines. - In: Innovation in mechanical engineering - shaping the future, (2011), insges. 5 S.
http://www.db-thueringen.de/servlets/DocumentServlet?id=19700
Neuartiges Kalibrierstrahlersystem zur Präzisionskalibrierung von Strahlungsthermometern. - In: XXV. Messtechnisches Symposium des Arbeitskreises der Hochschullehrer für Messtechnik e.V., (2011), S. 241-252
Traceable determination of relevant material parameters for the mass and force metrology. - In: Reflecting on the past - looking into the future, (2011), insges. 8 S.
In mass and force metrology the measurement of deformations of characteristically shaped bodies, so called deformation bodies, is a common principle to determine forces. Thereto the proportionality of the acting force F and the generated deformation v or strain e is used (e.g. in strain gage based transducers). The resulting strain and deformation is inversely proportional to the Young's modulus of the deformation body. However, the Young's modulus and thus the strain and the deflection are not constant. It is mainly dependent on the loading time and the temperature. - This paper discusses the usability of monolithic binocular shaped deformation bodies for a high precision determination of the effect of delayed elasticity v(t) at a constant load. Besides this the determination of the Young's modulus E0 and its temperature coefficient E0(T) is depicted. - Our determination of those parameters is based on an interferometric deformation measurement. Therefore one side of the deformation body is firmly clamped in a fixture. To the other side a defined and constant load F is applied to generate the spontaneous deformation v0. Due to the effect of delayed elasticity the spontaneous deformation v0 is followed by a time dependent deformation at a constant load v(t). The vertical force F is generated loading a defined mass m. Hence, the determined parameters are metrologically traceable to the wavelength of the light and the mass. In our experiments the resolution of v is 0.1 nm. The relative resolution v(t)/v0 is depending on the stiffness of the applied deformation body and is typically in the range of 1.10-6. - Based on different designs the influence of the fixture and the force application system is discussed. In the final realization no influence of the setup on the v(t) curves can be observed. An excellent suitability of binocular shaped deformation bodies and the chosen measurement setup for a high precision determination of the delayed elasticity is shown based on v(t)-measurements of a monolithic deformation body made of aluminum. Furthermore a determination of the spontaneous deflection v0 of a silicon deformation body is compared to a numerical computed deformation to prove the suitability of the setup for the Young's modulus determination.
Vacuum transfer system for loading the Sartorius prototype mass comparator CCL1007. - In: Reflecting on the past - looking into the future, (2011), insges. 6 S.
Modeling of 3D-measurement chains in nanopositioning and nanomeasuring machines. - In: Proceedings of the 14th Joint International IMEKO TC1 + TC7 + TC 13 Symposium, (2011), insges. 3 S.
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Nanopositioning and Nanomeasuring Machines are devices used for coodinate measurement and object manipulation in cm-ranges with nanometer precision. To decelerate a value for the position- or measurement uncertainty a 3D metrological model is necessary. The structure of such models depends on the arrangement of the machine parts in the measurement circles. The paper describes several model structures in vectorial form.
http://www.db-thueringen.de/servlets/DocumentServlet?id=19440
Untersuchungen zum Messunsicherheitsbudget nichtlinearer Teilmodelle in der Präzisionslängenmesstechnik. - In: Messunsicherheit praxisgerecht bestimmen, (2011), S. 209-219
Nanopositionier-und Nanomessmaschinen für die Anwendung in der Mikro- und Nanotechnik. - In: 4. Fachtagung Metrologie in der Mikro- und Nanotechnik 2011, (2011), S. 3-16
Prospects of multi-sensor technology for large-area applications in micro- and nanometrology. - In: Reflecting on the past - looking into the future, (2011), insges. 9 S.
Development of a novel flow rate measurement device for poorly conducting fluids using Lorentz force velocimetry. - In: Proceedings of the 8th International PAMIR Conference on Fundamental and Applied MHD, (2011), S. 353-356