Development of a novel flow rate measurement device for poorly conducting fluids using Lorentz Force Velocimetry :
Entwicklung einer neuen Durchflussmesstechnik zur Vermessung elektrisch schwachleitfähiger Fluide mittels Lorentzkraft Anemometrie. - In: Lasermethoden in der Strömungsmesstechnik, (2011), S. 15-1-15-4
Tactile 3D microprobe system with exchangeable styli. - In: Measurement science and technology, ISSN 1361-6501, Bd. 22 (2011), 9, S. 094018, insges. 7 S.
Over the past decade a trend of component miniaturization can be observed both in industry and in the laboratory, which involves an increasing demand for nanopositioning and nanomeasuring machines as well as for miniature tactile probes for measuring complex three-dimensional objects. The challenge is that these components - for example, diesel injectors, microgears and small optics - feature dimensions in the micrometre range with associated dimensional tolerances below 100 nm. For this reason, a significant number of research projects have dealt with microprobes for performing the dimensional measurements of microstructures with the goal of achieving measurement uncertainties in the nanometre range. This paper introduces an updated version of a 3D microprobe with an optical detection system developed at the Institute of Process Measurement and Sensor Technology. It consists of a measuring head and a separate probe system. The mechanical design of the probe system has been completely overhauled to enable the exchange of the stylus separately from the flexure elements. This is very important for the determination of the probing sphere's roundness deviations. The silicon membranes used in the first system design are therefore replaced by metal membranes. A new design of these membranes, optimized for isotropic probing forces and locking parasitic movements, is presented. Regarding the measuring head, the optical design has been redesigned to eliminate disruptive interference on the quadrant photodiode used for deflection measurement and to improve adjustment. Its dimensioning is discussed, especially the influence of the laser beam diameter on the interference contrast due to the parallel misalignment of the collimated laser beam. Initial measurement results are presented to prove functionality.
http://dx.doi.org/10.1088/0957-0233/22/9/094018
Measuring value correction and uncertainty analysis for homodyne interferometers. - In: Measurement science and technology, ISSN 1361-6501, Bd. 22 (2011), 9, S. 094028, insges. 6 S.
The Nanopositioning and Nanomeasuring Machine (NMM-1) developed at the Ilmenau University of Technology is equipped with three homodyne plane-mirror miniature interferometers for the measurement of the displacement of a movable corner mirror. The object being measured is placed on the corner mirror, which is positioned by a three-axis drive system. The uncertainty of interferometric length measurements is dependent on several factors. Starting with an improved equation for calculating length, this paper describes a part of the determination of the measurement uncertainty for a displacement measurement using two positions of the measuring mirror. The new approach separates the correlated influencing factors for three positions of the measuring mirror: for the position where the interferometer counter is reset to zero and the other two positions of two measured points. Additionally, the work takes into account the influence of the dead path length and its determination.
http://dx.doi.org/10.1088/0957-0233/22/9/094028
Novel control scheme for a high-speed metrological scanning probe microscope. - In: Measurement science and technology, ISSN 1361-6501, Bd. 22 (2011), 9, S. 094012, insges. 7 S.
http://dx.doi.org/10.1088/0957-0233/22/9/094012
Interferometric measurement of profile deviations of large precision mirrors. - In: Optical measurement systems for industrial inspection VII, 2011, 80821N, insges. 8 S.
Multisensor technology based on a laser focus probe for nanomeasuring applications over large areas. - In: Optical measurement systems for industrial inspection VII, 2011, 808203, insges. 9 S.
Friction and wear properties of WC/C nano-scale multilayer coatings on technical surfaces. - In: Tribology letters, ISSN 1573-2711, Bd. 44 (2011), 1, S. 89-98
http://dx.doi.org/10.1007/s11249-011-9826-2
Verbesserung der Kantenfindung mit einem Fokussensor durch Simulationen auf der Grundlage rigoroser Beugungstheorie. - In: Einladung zur 112. Jahrestagung vom 14. Juni bis 18. Juni 2011 und zur satzungsgemäßen ordentlichen Mitgliederversammlung der DGaO am 17. Juni 2011 in Ilmenau/Thüringen, (2011), S. 90
Multisensortechnologie mit der Nanopositionier- und Nanomessmaschine. - In: Einladung zur 112. Jahrestagung vom 14. Juni bis 18. Juni 2011 und zur satzungsgemäßen ordentlichen Mitgliederversammlung der DGaO am 17. Juni 2011 in Ilmenau/Thüringen, (2011), S. 38
Grundlagen laserinterferometrischer Präzisionsmessgeräte. - In: Einladung zur 112. Jahrestagung vom 14. Juni bis 18. Juni 2011 und zur satzungsgemäßen ordentlichen Mitgliederversammlung der DGaO am 17. Juni 2011 in Ilmenau/Thüringen, (2011), S. 8