Performance and limitation of nanomeasuring technology. - In: International journal of nanomanufacturing, ISSN 1746-9392, Bd. 7 (2011), 1, S. 54-62
Modeling of profilometry with laser focus sensors. - In: Modeling aspects in optical metrology III, ISBN 978-0-8194-8679-0, 2011, S. 80830C, insges. 12 S.
Recent advances in 3-D tactile micro- and nanometrology. - In: Proceedings of the 11th International conference of the European Society for Precision Engineering and Nanotechnology, (2011), S. 141-144
Interferometry for the next generation of nanopositioning and nanomeasuring machines. - In: Proceedings of the 11th International conference of the European Society for Precision Engineering and Nanotechnology, (2011), S. 88-91
Herausforderungen und Grenzen der interferometrischen Präzisionsmesstechnik. - In: Technisches Messen, ISSN 2196-7113, Bd. 78 (2011), 3, S. 114-117
Die Prinzipien, die Grundlagen und die Arbeitsweise von Zweifrequenz- und Einfrequenz-Interferometern werden beschrieben. Auf der Grundlage einer messtechnischen Analyse werden die Vorteile aber auch die Grenzen der laserinterferometrischen Messverfahren dargestellt. Die Ermittlung des kleinsten auflösbaren Weginkrements erlaubt die Berechnung der Auflösung von Interferometern. Neben den Abbé-Fehlern werden weitere Einflüsse aufgeführt, welche sich auf die Messunsicherheit interferometrischer Längenmessungen auswirken. Eine 3D-Abbéfehlerfreie Anordnung wird am Beispiel einer Nanopositionier- und Nanomessmaschine erläutert. Diese Maschine wurde in Zusammenarbeit zwischen dem Institut Prozessmess- und Sensortechnik und der SIOS Meßtechnik GmbH entwickelt.
http://dx.doi.org/10.1524/teme.2011.0122
Estimation of fixed-point temperatures - a practical approach. - In: Measurement, Bd. 44 (2011), 2, S. 385-390
Phase transition temperatures can be used for thermometer calibrations in accordance with the ITS-90. For this the thermometer is inserted into a fixed-point cell filled with a highly pure substance. While the substance is melting or freezing the temperature inside the cell remains almost constant and the thermometer measures a plateau in the temperature curve. From this plateau the phase transition temperature needs to be estimated for the calibration of the thermometer. This can be done using different mathematical methods, taking into account various systematic deviations as well as reproducibilities of the results depending on the chosen method, the fixed-point material's purity and above all the amount of fixed-point material. Hence this article presents results from measurements in miniature fixed-point cells filled with zinc of various purities. The plateau curves were measured at different heating rates and comparatively analysed using five different estimation methods.
http://dx.doi.org/10.1016/j.measurement.2010.10.015
Investigations of metrological models for the nanomeasuring and nanopositioning machine with respect to the measurement uncertainty by means of a Monte Carlo simulation. - In: Proceedings of: the twenty-fifth annual meeting of the American Society for Precision Engineering, ISBN 978-1-88770-656-8, (2010), S. 325-328
Combination of multi-sensor technology and multiple measurement strategies in micro- and nanometrology. - In: 10th International Symposium on Measurement and Quality Control (ISMQC 2010), ISBN 978-1-617-82019-9, (2010), S. 551-554
Combination of high-speed surface scanning and tactile 3-D coordinate measurement on theb basis of advanced mechatronic and control concepts. - In: Proceedings of: Control of precision systems, ISBN 978-1-88770-653-7, (2010), S. 40-44
Investigation of the metrological properties of a 3-D microprobe with optical detection system. - In: Instrumentation, metrology, and standards for nanomanufacturing IV, ISBN 978-0-8194-8263-1, 2010, 77670V, insges. 10 S.
Dimensional measurements of microstructures with uncertainties below 50nm require both nanopositioning and nanomeasuring machines (NPMMs) as well as appropriate microprobes. This paper introduces a novel 3-D tactile microprobe system developed at the Ilmenau University of Technology, Institute of Process Measurement and Sensor Technology, and contains an analysis of its metrological characteristics. - This microprobe system uses a silicon membrane to induce the measurement force and to operate as the damping system for the stylus. This damping is entirely brought about by internal friction. An optical detection system measures the deflection of the membrane and thus of the stylus. The optical detection system uses a single laser beam, focused on the backside of the silicon membrane. The reflected beam is split, with one part being used to measure the tilt about the x- and y-axes and the other part being fed back into an interferometer for deflection measurement in the z-direction. Thus, the deflection of the membrane can be measured with sub-nanometre resolution. An NPMM was used to analyse the metrological characteristics of the microprobe system and to calibrate it. This paper focuses on a detailed analysis of the three-dimensional reproducibility for point measurements by obtaining and evaluating a directional response pattern. This pattern is then compared to the behaviour of other microprobe systems. Furthermore, the work shows that the microprobe system can be applied successfully to scanning measurements and satisfactory results obtained. These results indicate that the microprobe system is well-suited for universal measurement tasks in dimensional metrology.