A novel concept for 5D nanopositioning, nanomeasuring and nanofabrication machines :
Ein neuartiges Konzept für 5D Nanopositionier-, Nanomess-, und Nanofabrikationsmaschinen. - In: Technisches Messen, ISSN 2196-7113, Bd. 89 (2022), 9, S. 634-643
In den vergangenen Jahren wurden an der TU-Ilmenau zahlreiche Entwicklungen im Bereich der Nanopositionier- und Nanomesstechnik realisiert. Insbesondere die NMM-1 [Gerd Jäger, Eberhard Manske, Tino Hausotte, Jans-Joachim Büchner, Nanomessmaschine zur abbefehlerfreien Koordinatenmessung, tm - Technisches Messen, 67(7-8), 2000] sowie die NPMM-200 [Eberhard Manske, Gerd Jäger, Tino Hausotte, Felix Balzer, Nanopositioning and Nanomeasuring Machine NPMM-200 - sub-nanometre resolution and highest accuracy in extended macroscopic working areas, euspen’s 17th International Conference, 2017] stellen ein Novum auf dem Gebiet der Koordinatenmesstechnik mit Nanometerpräzision unter Einhaltung des Abbe-Komparatorprinzips [Ernst Abbe, Messaparate für Physiker, Zeitschrift für Instrumentenkunde, 10:446-448, 1890] dar. Ausgehend von diesen Errungenschaften besteht ein nächster Schritt im Messen und Fabrizieren auf stark gekrümmten, asphärischen, oder freigeformten Oberflächen. Vor jenem Hintergrund wird im folgenden Artikel ein Konzept für ein zweiachsiges Rotationsmodul vorgestellt. Dieses dient als Erweiterung für die NMM-1 und ermöglicht über das kartesische Messvolumen von hinaus zusätzlich eine Rotation des Tools über 360 ˚ um die Hochachse sowie 60 ˚ Neigung. Die Umsetzung erfolgt über eine neuartige sphärische Parallelkinematik. Mit Hilfe eines interferometrischen In-Situ-Referenzmesssystems können die während der Rotationsbewegungen auftretenden translatorischen Positionsabweichungen detektiert werden. Erste Untersuchungen an einem Prototypenaufbau erbringen den Funktionsnachweis des Referenzmesssystems über den gesamten adressierbaren Winkelbereich.
https://doi.org/10.1515/teme-2022-0037
Measurement precision of a planar nanopositioning machine with a range of motion of Ø100 mm. - In: Applied Sciences, ISSN 2076-3417, Bd. 12 (2022), 15, 7843, S. 1-14
This work deals with various investigations into the accuracy of a newly developed planar nanopositioning machine. This machine, called Nanofabrication Machine 100 (NFM-100), has a positioning range of 100 mm in diameter. To determine the precision, various movement scenarios are performed with the machine table, and the trajectory deviation from the set trajectory is determined. In particular, the focus is on high velocities of up to 20 mm/s. Even at high speeds in the range of several millimetres per second, this machine can impress with its performance and only has a deviation in the nanometre range.
https://doi.org/10.3390/app12157843
Design of compliant mechanisms based on rigid-body mechanisms. - In: Romanian journal of technical sciences, ISSN 2601-5811, Bd. 67 (2022), 1, S. 61-78
The design of compliant mechanisms is a much more complicated task than their analysis. Consequently, there are many more methods available for the analysis of compliant mechanisms than for their synthesis. In this article, a contribution to the synthesis of compliant mechanisms is made by presenting a comparison of two different methods for their design. In both methods rigid-body systems are used as a basis for compliant mechanisms. Depending on the task of the compliant mechanism, one of these methods can be selected and applied. The deviations between the results of the used theory and measurement results as well as FEM results are less than 5.5 % for displacements and acting forces. Selected mechanisms for the realization of a straight-line motion of a point and for given relative motions are presented as examples.
Ultrastable, traceable optical frequencies for length metrology in long-range nanopositioning and nanomeasuring machines. - In: Proceedings of the 22nd International Conference of the European Society for Precision Engineering and Nanotechnology, (2022), S. 381-384
Investigations on the tracking control and performance of a long stroke vertical nanopositioning drive. - In: Proceedings of the 22nd International Conference of the European Society for Precision Engineering and Nanotechnology, (2022), S. 233-236
First prototype of a positioning device with subatomic resolution. - In: Proceedings of the 22nd International Conference of the European Society for Precision Engineering and Nanotechnology, (2022), S. 97-100
In the forthgoing work on a device that enables subatomic resolved highly reproducible positioning, a first prototype is here presented. The entire positioning system including the actuator, sensor and guiding mechanism, is realized as a micro-electro-mechanical system (MEMS) on chip level, based on silicon-on-insulator (SOI) technology. A modular printed circuit board acts as the mechanical as well as the electrical contacting interface for the silicon chip. First variants of a linear positioning system comprising axisymmetric double parallel crank structure are investigated. Pivot joints as flexure hinges with concentrated compliance are deployed. These hinges show minimal rotational axis displacement for small angles of deflection, thus ensuring smallest deviations to a straight-line path of the linear guiding mechanism. An electrostatic comb actuator transmits forces contactless to minimize over constraints. A measuring bridge in differential mode utilizes the same comb structures to measure the table position based on the capacitance change. Estimating the position resolution, limited by the resolution of the capacitive sensor, a measurable step width below 50 pm can be expected. In further steps, the device will be a platform to be equipped with a lattice-scale-based position measurement system according to achieve an even higher resolution and reproducibility.
Silicon carbide - graphene nano-gratings on 4H and 6H semi-insulating SiC. - In: Materials science forum, ISSN 1662-9752, Bd. 1062 (2022), S. 170-174
A technical methodology of fabrication of hierarchically scaled multitude graphene nanogratings with varying pitches ranging from the micrometer down to sub 40 nm scale combined with sub 10 nm step heights on 4H and 6H semi-insulating SiC for length scale measurements is proposed. The nanogratings were fabricated using electron-beam lithography combined with dry etching of graphene, incorporating a standard semiconductor processing technology. A scientific evaluation of critical dimension, etching step heights, and surface characterization of graphene nanograting on both polytypes were compared and evaluated.
https://doi.org/10.4028/p-wn4zya
Kalibriereinrichtung für Wärmestromsensoren. - In: Sensoren und Messsysteme, (2022), S. 482-486
Vorstellung des Konzepts eines keramischen Wärmestromsensors. - In: Sensoren und Messsysteme, (2022), S. 336-340
Amplituden- und Phasenmodulation in der Lock-In-gefilterten differentiellen konfokalen Profilometrie. - In: Sensoren und Messsysteme, (2022), S. 235-244