Influence of additional rotational movements on the measurement uncertainty of nanomeasuring, nanopositioning and nanofabrication machines. - In: Sensors and Measuring Systems, (2018), S. 168-171
The measurement of freeform surfaces, aspheric lenses or the sidewall roughness of high aspect ratio structures are a current challenge in nanometrology. There are different publications and commercial products with approaches to perform a measurement of those quantities [1, 2, 3, 4]. Beside the nanomeasurement the nanofabrication on curved freeform surfaces is an upcoming trend. The measurement or the fabrication on a freeform surface is limited by the possible tilt angle between the tools working axis and the local surface normal. To achieve larger angles and a minimal measurement uncertainty the tool must be placed optimal to the local surface. According to those requirements, concepts are developed to increase the degree of freedom in positioning. The x-y-z translational positioning system of an nanomeasuring machine (NMM-1) with a working volume of 25×25×5mm^3 [5] will be extended by additional rotational movements. The rotation can be achieved by three basic principles of motion which are the rotation of the sample, of the tool or a combination of the tool and the sample rotation. In a first step the principles of motion are described by their bare geometrical properties and decoupled from real positioning systems. A constant instantaneous centre of motion in the sensor measurement point is determined as the optimal principle for a rotational system. This principle is further investigated and is made concrete by choosing a combination of kinematics [6]. A vectorial approach based on the GUM [7] is used to evaluate the influence of the axes error motion on the measurement result. The method and the results for a combination of a rotary table and a goniometer axis are described in detail.
https://ieeexplore.ieee.org/document/8436163
Dynamic sensor positioning in large measuring volumes by an inverse kinematic concept. - In: Journal of physics, ISSN 1742-6596, Bd. 1065 (2018), 14, 142009, insges. 4 S.
https://doi.org/10.1088/1742-6596/1065/14/142009
The Planck-Balance - primary mass metrology for industrial applications. - In: Journal of physics, ISSN 1742-6596, Bd. 1065 (2018), 4, 042021, insges. 4 S.
https://doi.org/10.1088/1742-6596/1065/4/042021
Field emission from diamond nanotips for scanning probe lithography. - In: Journal of vacuum science & technology, ISSN 2166-2754, Bd. 36 (2018), 6, 06JL02, insges. 6 S.
https://doi.org/10.1116/1.5048193
Nanonewton force measurements based on electromagnetic force compensated balances (EMFC). - In: CPEM 2018, ISBN 978-1-5386-0974-3, (2018), insges. 2 S.
https://doi.org/10.1109/CPEM.2018.8501174
Multicomponent force and torque measurement in the new SI. - In: CPEM 2018, ISBN 978-1-5386-0974-3, (2018), insges. 2 S.
https://doi.org/10.1109/CPEM.2018.8500809
First results using the Planck-Balance. - In: CPEM 2018, ISBN 978-1-5386-0974-3, (2018), insges. 2 S.
https://doi.org/10.1109/CPEM.2018.8500904
Towards alternative 3D nanofabrication in macroscopic working volumes. - In: Measurement science and technology, ISSN 1361-6501, Bd. 29 (2018), 11, S. 114002, insges. 19 S.
https://doi.org/10.1088/1361-6501/aadb57
Approach to determining the uncertainty and predictive capability of a FEM simulation model of a small multiple fixed-point cell for calibration of contact thermometers :
Ansatz zur Bestimmung der Unsicherheit und Prognosefähigkeit eines FEM-Simulationsmodells einer kleinen Mehrfachfixpunktzelle für Kalibrierung von Berührungsthermometern. - In: Technisches Messen, ISSN 2196-7113, Bd. 85 (2018), S. S86-S94
Die Definition und Variation von Eingangsparametern eines Modells erlaubt nach einer Stichprobenberechnung die Auswertung von verteilten Ausgangsparametern. Sie werden als Reproduzierbarkeit dieser Berechnung angesehen. Für ein thermisches FEM-Modell einer kleinen Mehrfachfixpunktzelle für die Kalibrierung von Berührungsthermometern wird nach dieser Prozedur und nach einem Vergleich (Validierung) mit der Reproduzierbarkeit experimentell ermittelter Ergebnisse mittels einer Validierungsmetrik ein Vertrauensintervall berechnet, in dem Prognosen mit dem Modell an einer nicht validierten Stelle durchgeführt werden könnten. Dieser Ansatz wird in diesem Beitrag vorgestellt.
https://doi.org/10.1515/teme-2018-0027
Heterodynes Stehende-Welle-Interferometer :
Heterodyne standing-wave interferometer. - In: Technisches Messen, ISSN 2196-7113, Bd. 85 (2018), S. S80-S85
This manuscript describes a novel standingwave arrangement with two laser sources of different wavelengths, emitting towards each other. The resulting standing wave has a continuously moving intensity profile, a thin, transparent photo sensor is inserted into. When the sensor is moved along the optical axis a frequency shift, proportional to the velocity, occurs. This frequency shift can be evaluated for the purpose of interferometric length measurements.
https://doi.org/10.1515/teme-2018-0017