Recent advances in 3-D tactile micro- and nanometrology. - In: Proceedings of the 11th International conference of the European Society for Precision Engineering and Nanotechnology, (2011), S. 141-144
Interferometry for the next generation of nanopositioning and nanomeasuring machines. - In: Proceedings of the 11th International conference of the European Society for Precision Engineering and Nanotechnology, (2011), S. 88-91
Investigations of metrological models for the nanomeasuring and nanopositioning machine with respect to the measurement uncertainty by means of a Monte Carlo simulation. - In: Proceedings of: the twenty-fifth annual meeting of the American Society for Precision Engineering, ISBN 978-1-88770-656-8, (2010), S. 325-328
Combination of multi-sensor technology and multiple measurement strategies in micro- and nanometrology. - In: 10th International Symposium on Measurement and Quality Control (ISMQC 2010), ISBN 978-1-617-82019-9, (2010), S. 551-554
Combination of high-speed surface scanning and tactile 3-D coordinate measurement on theb basis of advanced mechatronic and control concepts. - In: Proceedings of: Control of precision systems, ISBN 978-1-88770-653-7, (2010), S. 40-44
Investigation of the metrological properties of a 3-D microprobe with optical detection system. - In: Instrumentation, metrology, and standards for nanomanufacturing IV, ISBN 978-0-8194-8263-1, 2010, 77670V, insges. 10 S.
Dimensional measurements of microstructures with uncertainties below 50nm require both nanopositioning and nanomeasuring machines (NPMMs) as well as appropriate microprobes. This paper introduces a novel 3-D tactile microprobe system developed at the Ilmenau University of Technology, Institute of Process Measurement and Sensor Technology, and contains an analysis of its metrological characteristics. - This microprobe system uses a silicon membrane to induce the measurement force and to operate as the damping system for the stylus. This damping is entirely brought about by internal friction. An optical detection system measures the deflection of the membrane and thus of the stylus. The optical detection system uses a single laser beam, focused on the backside of the silicon membrane. The reflected beam is split, with one part being used to measure the tilt about the x- and y-axes and the other part being fed back into an interferometer for deflection measurement in the z-direction. Thus, the deflection of the membrane can be measured with sub-nanometre resolution. An NPMM was used to analyse the metrological characteristics of the microprobe system and to calibrate it. This paper focuses on a detailed analysis of the three-dimensional reproducibility for point measurements by obtaining and evaluating a directional response pattern. This pattern is then compared to the behaviour of other microprobe systems. Furthermore, the work shows that the microprobe system can be applied successfully to scanning measurements and satisfactory results obtained. These results indicate that the microprobe system is well-suited for universal measurement tasks in dimensional metrology.
High precission optical position sensor for electromagnetic force compensated balances. - In: IMEKO TC3 & TC5 & TC22 International Conference, (2010), S. 91-94
Vacuum transfer system for loading the Sartorius prototype mass comparator CCL1007. - In: IMEKO TC3 & TC5 & TC22 International Conference, (2010), S. 77-80
Comparison of different load changers for EMFC-balances. - In: IMEKO TC3 & TC5 & TC22 International Conference, (2010), S. 65-68
Parametric mechatronic model of a load cell with electromagnetic force compensation. - In: IMEKO TC3 & TC5 & TC22 International Conference, (2010), S. 29-32