Investigation of new silicon load cells with thin-film strain gauges. - In: Fundamental and applied metrology, ISBN 978-963-88410-0-1, (2009), S. 379-382
The influence of the force feed-in system on high-accuracy low force measurement. - In: Fundamental and applied metrology, ISBN 978-963-88410-0-1, (2009), S. 235-238
Novel high-resolution interferometric materials testing device for the determintion of the viscoelastic behaviour of high-tech plastics. - In: Fundamental and applied metrology, ISBN 978-963-88410-0-1, (2009), S. 230-234
Comparison of different methods of fixed-point temperature evaluation. - In: Fundamental and applied metrology, ISBN 978-963-88410-0-1, (2009), insges. 5 S.
The estimation of the fixed-point temperatures from measured plateau curves can be carried out using different mathematical methods. Depending on the method used and the size of the fixed-point cell, different systematic deviations and reproducibilities of the calculated tempera-tures arise. They typically develop during the evaluation of measurements from small fixed-point cells. Thus the phase transformation temperatures of miniaturised fixed-point cells with zinc of different purities were measured and five different methods were compared.
Nanomeasuring and nanopositioning engineering . - In: Fringe 2009, (2009), S. 390-397
The complete acquisition of the topography of a special multi-mirror arrangement with the help of a Fizeau interferometer. - In: Optical measurement systems for industrial inspection VI, 2009, 73890O, insges. 10 S.
Characterisation of the metrological properties of 3-D microprobes. - In: Laser metrology and machine performance IX, ISBN 978-0-9553082-7-7, (2009), S. 243-252
Monte Carlo simulation to determine the measurement uncertainty of a metrological scanning probe microscope measurement. - In: Scanning microscopy 2009, ISBN 978-0-8194-7654-8, 2009, 737816, insges. 12 S.
A proprietary metrological scanning probe microscope (SPM) with an interferometer, developed by the Institute of Process Measurement and Sensor Technology at the Ilmenau University of Technology (IPMS), is used as a stationary probe system in the nanomeasuring and nanopositioning machine (NPMM). Due to the movements of the NPMM, the total microscope measuring range is 25mm × 25mm × 5mm with a positioning resolution of less than 0.1nm. Examples for specimens are step height standards and one-dimensional gratings. The repeatability has been determined at less than 0.5nm for measurements on calibrated step height standards and less than 0.2nm for the gratings. The measurement results of these samples are always directly related to the corresponding measurement uncertainty, which can be calculated using an uncertainty budget. A new traceable method has been developed using a vectorial modular model. With this approach, it is possible to quickly insert new sub-models and to individually analyze their effects on the total measurement uncertainty. The analysis of these effects with regard to their uncertainties is done by Monte Carlo Simulation (MCS), because some models have partially or fully nonlinear character of which one example is the interferometer model of the metrological SPM. The complete development and analysis of these models is presented for one specific measurement task. The measurement results and the corresponding measurement uncertainty were obtained by Monte Carlo Simulation. Comparisons with the GUM have shown that the proposed procedure is a good alternative to achieve reasonable measurement results with uncertainty estimation.
Design and performance of the new Sartorius 1kg-prototype mass comparator for high precision mass determination and research applications. - In: Transverse disciplines in metrology, ISBN 978-1-8482-1048-6, (2009), S. 657-667
Mass dissemination using a robot system. - In: Technisches Messen, ISSN 2196-7113, Bd. 76 (2009), 7/8, S. 382-387
http://dx.doi.org/10.1524/teme.2009.0976