Optical system for the simultaneous measurement of two-dimensional straightness errors and the roll angle. - In: Optical sensors 2009, ISBN 978-0-8194-7630-2, 2009, 73560S, insges. 8 S.
Navigation in a large measurement volume by using AFM technology as a sensor system in the NPMM. - In: Technisches Messen, ISSN 2196-7113, Bd. 76 (2009), 5, S. 274-277
http://dx.doi.org/10.1524/teme.2009.0968
The application of the dual-beam laser interferometer for calibration precision machine tools. - In: Technisches Messen, ISSN 2196-7113, Bd. 76 (2009), 5, S. 245-247
http://dx.doi.org/10.1524/teme.2009.0963
Uncertainty consideration of the coordinate system in nanopositioning- and nanomeasuring machines. - In: Technisches Messen, ISSN 2196-7113, Bd. 76 (2009), 5, S. 235-238
http://dx.doi.org/10.1524/teme.2009.0961
The metrological basis and operation of nanopositioning and nanomeasuring machine NMM-1. - In: Technisches Messen, ISSN 2196-7113, Bd. 76 (2009), 5, S. 227-234
http://dx.doi.org/10.1524/teme.2009.0960
Friction identification and compensation on nanometer scale. - In: IFAC Proceedings Volumes, ISSN 1474-6670, Bd. 41 (2008), 2, S. 2014-2019
This work concerns the modelling and experimental verification of the highly nonlinear friction behavior in positioning on the nanometer scale. The main goal of this work is to adjust and identify a simple dynamic friction model which allows a model-based estimation of the friction force in combination with the system inertia against displacement. Experiments in the pre-sliding and sliding friction regimes are conducted on an experimental setup. A hybrid two-stage parameter estimation algorithm is used to fit the model parameters based on the experimental data. Finally, the identified friction model is utilized as a model-based feedforward controller combined with a classical feedback controller to compensate the nonlinear friction force and reduce tracking errors.
https://doi.org/10.3182/20080706-5-KR-1001.00342
Realisierungsmöglichkeiten für intelligente Temperaturfühler in der Verfahrenstechnik. - In: Automation 2008 - Lösungen für die Zukunft, (2008), S. 27-30
Limits of precision measurements based on interferometers. - In: Fourth International Symposium on Precision Mechanical Measurements, 2008, 713002, insges. 6 S.
Laser interferometric methods are employed in precision measurements and positioning tasks, since they provide the means for attaining high metric resolution and precision, even over large measurement ranges. The most important fundamental principles of heterodyne and homodyne interferometers are discussed. A metrological analysis makes it possible to describe the advantages and limits of laser interferometry. The design and functionality of fibre-coupled miniature interferometers are described. The broad applicability of interferometers to microtechnology, nanotechnology and precision mechatronics is explained.
Uncertainty consideration of the mirror-interferometer system in nanopositioning and nanomeasuring machines. - In: Interferometry XIV: applications, ISBN 978-0-8194-7284-7, 2008, 70640L, insges. 6 S.
Novel III-nitride based transparent photodetectors for standing wave interferometry. - In: Physica status solidi. Applications and materials science. - Weinheim : Wiley-VCH, 2005- , ISSN: 1862-6319 , ZDB-ID: 1481091-8, ISSN 1862-6319, Bd. 205 (2008), 8, S. 2080-2084
http://dx.doi.org/10.1002/pssa.200778888