Dynamic structure evaluation of isolating seismic block for primary vibration calibration system. - In: Proceedings, (2008), S. 95-96
Novel investigations and developments in a metrological scanning probe microscope. - In: Proceedings, (2008), S. 61-62
Standing wave based microinterferometer. - In: Proceedings, (2008), S. 39-40
Monte Carlo simulation to determine the measurement uncertainty of metrological models for the nanomeasuring and nanopositioning machine. - In: Proceedings, (2008), S. 35-36
Limits of the precision engineering. - In: Proceedings, (2008), S. 7-8
Ultra-thin InGaN photodetectors for standing wave interferometry. - In: Physica status solidi, ISSN 1610-1642, Bd. 5 (2008), 6, S. 2117-2119
http://dx.doi.org/10.1002/pssc.200778467
Development of an optical accelerometer for low-frequency vibration using the voice coil on a DVD pickup head. - In: Measurement science and technology, ISSN 1361-6501, Bd. 19 (2008), 8, S. 084012, insges. 7 S.
http://dx.doi.org/10.1088/0957-0233/19/8/084012
Konsistenz im Nanometerbereich: messtechnischer Vergleich von optischen, taktilen und AFM-Sensoren. - In: Sensoren und Messsysteme 2008, (2008), S. 135-144
High-precision estimation of circle and cylinder form deviations by means of a fibre-coupled laser interferometer arrangement . - In: Proceedings of the 7th international conference, (2007), S. 329-332
With growing requirements to achieve an ever better precision in the metal-working industry, novel high-precision measuring techniques need to be developed. Especially in the automobile industry, for example ring gauges presenting a roundness deviation of < 0.1 mm are required. Thus, measuring uncertainties in the 10 nm-range are highly desirable when producing such ring gauges. The measuring set-up has to meet highest metrological demands, and error sources have to be minimized or even avoided. In addition, measuring and testing shall be carried out at an ever higher speed.
Investigations of load cells made of singlecrystalline silicon with sputrered-on strain gauges. - In: IMEKO TC3 & TC16 & TC22 International Conference, (2007), insges. 12 S.