Schober, Andreas; Kittler, Gabriel; Buchheim, Carsten; Majdeddin, Ali; Cimalla, Volker; Fischer, Michael; Yanev, Vasil; Himmerlich, Marcel; Krischok, Stefan; Schäfer, Jürgen A.; Romanus, Henry; Sändig, Torsten; Burgold, Jörg; Weise, Frank; Wurmus, Helmut; Drüe, Karl-Heinz; Hintz, Michael; Thust, Heiko; Gessner, Jörg; Kittler, Mario; Schwierz, Frank; Doll, Theodor; Manske, Eberhard; Mastylo, Rostyslav; Jäger, Gerd; Knedlik, Christian; Winkler, Gerd; Kern, Heinrich; Hoffmann, R.; Spieß, Lothar; Spitznas, Armin; Gottwald, Eric; Weibezahn, Karl-Friedrich; Wegener, Dennis; Schwienhorst, Andreas; Ambacher, Oliver
A novel class of sensors for system integrative concepts in biotechnological applications. - In: Technische Systeme für Biotechnologie und Umwelt, (2004), S. 163-169
A novel class of sensors for system integrative concepts in biotechnological applications. - In: Technische Systeme für Biotechnologie und Umwelt, (2004), S. 163-169
Hofmann, Norbert; Hausotte, Tino; Jäger, Gerd; Manske, Eberhard
Integration of an atomic force microscope in a nanopositioning and nanomeasuring machine. - In: 8th International Symposium on Measurement and Quality Control in Production, (2004), S. 547-553
Integration of an atomic force microscope in a nanopositioning and nanomeasuring machine. - In: 8th International Symposium on Measurement and Quality Control in Production, (2004), S. 547-553
Jäger, Gerd; Manske, Eberhard; Hausotte, Tino; Füßl, Roland; Grünwald, Rainer; Büchner, Hans-Joachim; Schott, Walter
Optical fibre coupled miniature interferometers designed for application in micro and nano devices. - In: Proceedings of the nineteenth annual meeting, (2004), S. 145-148
Optical fibre coupled miniature interferometers designed for application in micro and nano devices. - In: Proceedings of the nineteenth annual meeting, (2004), S. 145-148
Jäger, Gerd; Manske, Eberhard; Hausotte, Tino; Füßl, Roland; Grünwald, Rainer; Büchner, Hans-Joachim
Micro and nano devices based on miniature plane mirror interferometers. - In: Proceedings of the 8th International Conference on Mechatronics Technology, (2004), S. 7-11
Micro and nano devices based on miniature plane mirror interferometers. - In: Proceedings of the 8th International Conference on Mechatronics Technology, (2004), S. 7-11
Jäger, Gerd; Füßl, Roland; Manske, Eberhard; Grünwald, Rainer; Büchner, Hans-Joachim; Hausotte, Tino; Wurzbacher, Holger; Dontsov, Denis; Schott, Walter
Nanometer-scale miniature interferometers developed for nano measurements in micro- and nanotechnology. - In: Proceedings of the 4th EUSPEN international conference, (2004), S. 232-233
Nanometer-scale miniature interferometers developed for nano measurements in micro- and nanotechnology. - In: Proceedings of the 4th EUSPEN international conference, (2004), S. 232-233
Mastylo, Rostyslav; Manske, Eberhard; Jäger, Gerd
Development of a focus sensor and its integration into the nanopositioning and nanomeasuring machine. - In: Proceedings, (2004), S. 123-126
Development of a focus sensor and its integration into the nanopositioning and nanomeasuring machine. - In: Proceedings, (2004), S. 123-126
Mandryka, Victor; Büchner, Hans-Joachim; Jäger, Gerd
Design aspects in the development of a standing wave interferometer. - In: Optical metrology in production engineering, (2004), S. 175-183
Design aspects in the development of a standing wave interferometer. - In: Optical metrology in production engineering, (2004), S. 175-183
Welter, Matthias; Manske, Eberhard; Jäger, Gerd
Interferometric sensor and calibration system for high-precision applications. - In: Smart structures and materials 2004 - Smart sensor technology and measurement systems, (2004), S. 26-37
Interferometric sensor and calibration system for high-precision applications. - In: Smart structures and materials 2004 - Smart sensor technology and measurement systems, (2004), S. 26-37
Hofmann, Norbert; Hausotte, Tino; Jäger, Gerd; Manske, Eberhard
Measurement with an atomic force microscope using a long travel nanopositioning and nanomeasuring machine. - In: 2004 4th IEEE Conference on Nanotechnology, (2004), S. 183-185
Measurement with an atomic force microscope using a long travel nanopositioning and nanomeasuring machine. - In: 2004 4th IEEE Conference on Nanotechnology, (2004), S. 183-185
Manske, Eberhard; Mastylo, Rostyslav; Hausotte, Tino; Hofmann, Norbert; Jäger, Gerd
A modular auto focus/AFM-system with subnanometer capability for application in a nanopositioning- and nanomeasuring machine. - In: Proceedings of the 4th EUSPEN international conference, (2004), S. 262-263
A modular auto focus/AFM-system with subnanometer capability for application in a nanopositioning- and nanomeasuring machine. - In: Proceedings of the 4th EUSPEN international conference, (2004), S. 262-263