A novel planar two-axis leaf-type notch flexure hinge with coincident rotation axes and its application to micropositioning stages. - In: Microactuators, microsensors and micromechanisms, (2021), S. 1-14
Compliant mechanisms with flexure hinges are well-suited for high-precision applications due to their smooth and repeatable motion. However, the synthesis of planar compliant mechanisms based on notch flexure hinges is mostly limited to the use of single-axis hinges due to the lack of certain multiple-axis flexure hinges. This contribution introduces a novel planar leaf-type notch flexure hinge with two coincident rotation axes based on circular pre-curved leaf springs. A generally suitable hinge geometry is determined through a parametric study using the finite element method (FEM). Finally, the two-axis flexure hinge is applied and investigated for the use in two planar micropositioning stages for the rectilinear guidance of an output link with a large centimeter stroke. The presented two-axis flexure hinge turns out to be a suitable approach to monolithically connect three links of a compliant mechanism in a planar and precise way.
https://doi.org/10.1007/978-3-030-61652-6_1
Characterization of thin flexure hinges for precision applications based on first eigenfrequency. - In: Microactuators, microsensors and micromechanisms, (2021), S. 15-24
Flexure hinges with small cross-section heights are state of the art in numerous precision engineering applications due to their capability for smooth and repeatable motion. However, the high sensitivity to manufacturing influences represents a challenge. We propose a characterization method for flexure hinges based on the measurement of the free oscillation, to enable the consideration of manufacturing influences in the early stages of the design process. Three semi-circular flexure hinges with different cross-section heights and highly accurate geometry were investigated experimentally to compare them with three theoretical modeling approaches. The results for the three flexure hinge specimens showed small deviations to the predicted values from the models which is in agreement with the results of dimensional measurements. With each modeling approach, a deviation of the minimal notch height from the nominal value can be calculated. This value, in turn, can be used as manufacturing allowance for subsequent manufacturing of compliant mechanisms using the same manufacturing method. An exemplary compliant parallel-crank mechanism proves the applicability of the concept to compliant mechanisms with multiple flexure hinges.
https://doi.org/10.1007/978-3-030-61652-6_2
Optimization of compliant path-generating mechanisms based on non-linear analytical modeling. - In: Microactuators, microsensors and micromechanisms, (2021), S. 25-35
Monolithic compliant mechanisms are often used in precision engineering applications for path-generating tasks due to their many advantages. They are mostly realized with concentrated compliance in form of notch flexure hinges and achieve their motion due to bending of the hinges. This contribution presents the non-linear analytical modeling of compliant mechanisms with power function-based notch flexure hinges and their efficient optimization of the elasto-kinematic path-generating properties using MATLAB. Different planar mechanisms are analytically characterized with the theory for large deflections of curved rod-like structures. A verification of the analytical model is exemplified by FEM simulations for a four-hinge Watt mechanism as a point guidance mechanism and for a 12-hinge pantograph mechanism as a plane guidance mechanism. Further, the exponents of the power function contours for each hinge are individually optimized on the example of an Evans and a Roberts mechanism. This is achieved with the goal of minimizing the straight-line deviation of their coupler points realizing a stroke of 10 mm.
https://doi.org/10.1007/978-3-030-61652-6_3
Conceptual design of a microscale balance based on force compensation. - In: Microactuators, microsensors and micromechanisms, (2021), S. 103-114
Macroscopic electromagnetic force compensation (EMFC) balances are well established but were not yet demonstrated within microsystems. Hence, in this paper, the concept and the design of a micro fabricated force compensation balance is presented. The implemented concentrated compliance mechanism in form of flexure hinges enables motion with high precision, which is combined with a force compensation mechanism. The concept of force compensation promises a high measurement range, which is expected to be up to 0.5 mN, while still enabling a high resolution of less than 8 nN. The developed dynamic model of the miniaturized balance is used for the design of a PID-controller strategy. Here, continuous and time-discrete controller approaches are compared. The time-discrete controller with realistic delay times, leads to an accuracy of the controller, which is better than the expected accuracy of the integrated capacitive position sensor.
https://doi.org/10.1007/978-3-030-61652-6_9
Investigations on kinematic couplings for tool-changing interfaces in highest-precision devices. - In: Proceedings of the 20th International Conference of the European Society for Precision Engineering and Nanotechnology, (2020), S. 557-558
Conceptional design of a positioning device with subatomic resolution and reproducibility. - In: Proceedings of the 20th International Conference of the European Society for Precision Engineering and Nanotechnology, (2020), S. 305-306
Corner loading and its influence on the tilt sensitivity of precision weighing cells. - In: Proceedings of the 20th International Conference of the European Society for Precision Engineering and Nanotechnology, (2020), S. 95-98
Wireless actuation within hermetically enclosed precision systems. - In: Proceedings of the 20th International Conference of the European Society for Precision Engineering and Nanotechnology, (2020), S. 73-74
Measuring and adjusting the stiffness and tilt sensitivity of a novel 2D monolithic high precision electromagnetic force compensated weighing cell. - Boulder, Colo. : NCSL International. - 1 Online-Ressource (1 Seite)Publikation entstand im Rahmen der Veranstaltung: Metrology in motion : NCSLI workshop & symposium, August 24-29, 2019
Further improvements in high precision mass comparison are a recent issue in the dissemination chain of the mass standard. One of the most precise methods of mass comparison is achieved by the use of high precision electromagnetic force compensated (EMFC) weighing cells as part of mass comparators. The mechanics of EMFC weighing cells are based on compliant mechanisms with concentrated compliances in form of flexure hinges. Total mechanical stiffness and tilt sensitivity are limiting factors with regard to the resolution of EMFC weighing cells. In order to optimize their performance, the stiffness and the tilt sensitivity of the systems need to be minimized. Due to manufacturing restrictions and robustness requirements, a further reduction of the thickness of the pivots is not desirable. In this paper, an alternative to reduce stiffness and tilt sensitivity by adding trim weights in combination with an astasizing adjustment is presented. Based on the results of the investigations, a new planar monolithic mechanism for an EMFC weighing cell is designed, providing the possibility to adjust trim masses. The new mechanism is set up and adjusted according to the developed mechanical model. A parameter combination for a total stiffness slightly above zero and a tilt sensitivity close to zero is found. For the evaluation of the adjustment success and the vacuum compatibility, the system is tested under high vacuum conditions.
https://doi.org/10.51843/wsproceedings.2019.13
Generation of a static torque in the range of 1 mNm to 1 Nm according to the Jokey-weight principle. - In: Messunsicherheit - Prüfprozesse 2019, (2019), S. 111-120