This subproject pursues the traceable calibration of combined force-position sensor systems. The aim of the further work is to significantly improve the metrologically traceable calibration of force sensors in the nanonewton range and to develop a fundamental measuring device for small forces from the calibration setup realsized in the first generation. This fundamental measuring device is to be traceable to SI units in three different ways:
- Gravimetrically with small mass standards
- Electromagnetically according to the Kibble-Waagen principle
- Electrostatic
Another goal is to transfer the calibration of nanonewton forces - which has been demonstrated on a large scale - to MEMS systems. In cooperation with subproject A1, methods for direct and indirect calibration of the selfactuated MEMS probes developed there will be found and investigated. The long-term goal is MEMS probes that measure forces and displacements and are self-calibrating in-situ. With the cantilever calibration system as well as with the calibrated cantilevers/feeler probes, we want to implement and investigate calibrations on reference marks of known geometries and material properties on the object itself for the first time, taking advantage of the high positioning accuracy of the NPMM. A conceptual and substantive collaboration is planned in particular with the subprojects KR2, A1 and TM1.
Project leader: Prof. Fröhlich, Prof. Reger, Dr. Schäffel