Google Search
Prof. Dr.-Ing. Jens Müller
Head of the Group
Telefon: +49 3677 69-2606
Due to its good electrical and mechanical properties, low-temperature co-fired ceramics mechanical properties, Low Temperature Co-fired Ceramic (LTCC) is a promising material for packaging integrated circuits. However, one of the limiting factors in the use of LTCC is its high surface roughness.
To improve surface quality and meet performance requirements, the LTCC surface undergoes several processing steps. The first and one of the main stages is the surface polishing process.
The project aims to optimize the chemical and mechanical polishing (CMP) process to obtain the required LTCC surface properties.
The project will accomplish the following tasks:
1. Performing the CMP process of LTCC substrates at different combinations of its parameters.
2. Cleaning of the obtained samples by chemical and megasonic cleaning methods.
3. Investigation of the physical properties of the surface of polished LTCC samples.
3. Graphical analysis of obtained data and determination of optimal conditions for the CMP process of LTCC substrates.
The main research methods:FRT, LSM, AFM, SEM, optical microscopy
Contact: Dr. Kateryna Soloviova, ZMN 206, Tel. 03677 69-3440
Improving the manufacturing process of silicon-ceramic based pressure sensors(Bachelor thesis/ Project with seminar; Language: German or English)
In this work, the manufacturing process of silicon-ceramic pressure sensors will be re-examined and it is checked if the established process can be further improved. The geometry of the air feeding channel in the ceramic part is varied to validate the air distribution inside the sensor in correlation with the channel geometry. Furthermore, the use of carbon inlays during the manufacturing and sintering process is investigated to stabilize the cavities.
After familiarization with the SiCer technology, the following topics should be treated:
Recommended work steps:
Contact: M. Sc. Cathleen Kleinholz, Kirchhoff building room 1051, Tel. 69 3385
The development of high density interconnect ceramic-based platform (Language: English)
The evolution of high performance electronics requires the development of high density interconnect packages. Hence, the development of miniaturized conductive structures and microvias to electrically connect the structures in different ceramic layers is very important.
This project aims to analyse the combination of fine line structures with conductive microvias fabricated in green Low Temperature Co-fired Ceramics (LTCC) tapes to create on-surface and embedded miniaturized structures. The conductors will be optimized to be connected to microvias up to 8 µm in diameter. The following goals should be achieved:
Keyword: Stencil-printing, screen-printing, HDI, microvias, LTCC technology
Tasks:
Step 1:
Literature review in the following subjects:
Step 2
We expect very good professional performance in studies, above-average commitment and willingness to learn.
We offer an interesting job in a motivated, interdisciplinary team. If you are curious, I look forward to a personal conversation.
Contact: Dr.-Ing. Nesrine Jaziri, Kirchhoff building room 1065, Tel. 69 1117
The analysis of hybrid thick/thin-film based micro-thermoelectric generator (Language: English)
Thermoelectric generators (TEGs) present an outstanding performance for converting thermal into electrical energy. TEGs are used in many sectors from low to high power applications. Combining thick and thin technologies allows the creation of high performance miniaturized TEGs.
The objective of this work is the analysis of thermoelectric generators fabricated in in Low Temperature Co-fired Ceramics (LTCC) substrates using both thick and thin-film technologies.
For this purpose, the following subtasks are to be solved:
Tools: LSM, SEM, AFM, AutoCAD, optical microscopes (UHL and Nikon microscopes)
Keyword: TEGs, energy harvesting, LTCC, PECVD, sputtering
We expect very good professional performance in studies, above-average commitment and willingness to learn.
We offer an interesting job in a motivated, interdisciplinary team. If you are curious, I look forward to a personal conversation.
Contact: Dr.-Ing. Nesrine Jaziri, Kirchhoff building room 1065, Tel. 69 1117