Frank, Thomas; Lotz, Markus; Hackel, Tobias; Theska, René; Höhne, Günter
Extremer Leichtbau von Messspiegeln für die interferometrische Positionsmessung. - In: Maschinenbau von Makro bis Nano, 2005, [01.P.04], insges. 7 S.
http://www.db-thueringen.de/servlets/DocumentServlet?id=16763
Extremer Leichtbau von Messspiegeln für die interferometrische Positionsmessung. - In: Maschinenbau von Makro bis Nano, 2005, [01.P.04], insges. 7 S.
http://www.db-thueringen.de/servlets/DocumentServlet?id=16763
Lotz, Markus; Frank, Thomas; Hackel, Tobias; Höhne, Günter; Theska, René
Konstruktionsprinzipien zum Entwurf von Nanopositioniermaschinen. - In: Maschinenbau von Makro bis Nano, 2005, [01.07], insges. 7 S.
http://www.db-thueringen.de/servlets/DocumentServlet?id=16746
Konstruktionsprinzipien zum Entwurf von Nanopositioniermaschinen. - In: Maschinenbau von Makro bis Nano, 2005, [01.07], insges. 7 S.
http://www.db-thueringen.de/servlets/DocumentServlet?id=16746
Höhne, Günter; Brix, Torsten; Lotz, Markus; Theska, René; Frank, Thomas; Hackel, Tobias
Design of high precision positioning and measuring machines using virtual prototyping. - In: Proceedings of the COBEM 2005, 18th International Congress of Mechanical Engineering, (2005), insges. 8 S.
Design of high precision positioning and measuring machines using virtual prototyping. - In: Proceedings of the COBEM 2005, 18th International Congress of Mechanical Engineering, (2005), insges. 8 S.
Theska, René; Frank, Thomas; Hackel, Tobias; Höhne, Günter; Lotz, Markus
Methodical approach for performance rating during the design process of precision machines. - In: Engineering design and the global economy, (2005), S. 527-528
Methodical approach for performance rating during the design process of precision machines. - In: Engineering design and the global economy, (2005), S. 527-528
Frank, Thomas; Lotz, Markus; Hackel, Tobias; Theska, René; Höhne, Günter
Extreme lightweight stage mirrors for precision positioning combining silicon and Zerudur. - In: Proceedings of the twentieth annual meeting, 2005, insges. 4 S.
Extreme lightweight stage mirrors for precision positioning combining silicon and Zerudur. - In: Proceedings of the twentieth annual meeting, 2005, insges. 4 S.
Lotz, Markus; Frank, Thomas; Hackel, Tobias; Theska, René; Höhne, Günter
Novel designs of measuring mirrors for ultra high precision machines. - In: Proceedings of the 5th international conference of the European Society for Precision Engineering and Nanotechnology, (2005), S. 21-24
Novel designs of measuring mirrors for ultra high precision machines. - In: Proceedings of the 5th international conference of the European Society for Precision Engineering and Nanotechnology, (2005), S. 21-24
Lotz, Markus; Frank, Thomas; Hackel, Tobias; Theska, René; Höhne, Günter
New designs of stage mirrors for highest precision positioning and measuring machines. - In: Proceedings of the twentieth annual meeting, (2005), S. 60-63
New designs of stage mirrors for highest precision positioning and measuring machines. - In: Proceedings of the twentieth annual meeting, (2005), S. 60-63
Frank, Thomas; Theska, René; Lotz, Markus; Hackel, Tobias; Höhne, Günter
Weight compensation mechanisms for precision vertical positioning. - In: Proceedings of the 5th international conference of the European Society for Precision Engineering and Nanotechnology, (2005), S. 429-432
Weight compensation mechanisms for precision vertical positioning. - In: Proceedings of the 5th international conference of the European Society for Precision Engineering and Nanotechnology, (2005), S. 429-432
Frank, Thomas; Theska, René
New ways of vibration suppression for ultra precision equipment. - In: My2M 2004 - Microtechnology, Mechatronics and Materials, (2004), S. 62-66
New ways of vibration suppression for ultra precision equipment. - In: My2M 2004 - Microtechnology, Mechatronics and Materials, (2004), S. 62-66
Theska, René; Frank, Thomas; Hackel, Tobias; Höhne, Günter; Lotz, Markus
Design principles for highest precision applications. - In: Proceedings of the nineteenth annual meeting, (2004), S. 245-248
Design principles for highest precision applications. - In: Proceedings of the nineteenth annual meeting, (2004), S. 245-248