High precision optical step detection. - In: DGaO-Proceedings, ISSN 1614-8436, Bd. 116 (2015), A3, insges. 2 S.
Due to the ongoing miniaturization of electronic, mechanic and optics components the precise position determination of surface profiles within optical measurement processes becomes more important. The investigation of diffraction pattern arise from the interaction of electromagnetic radiation with edges or rather steps with a height smaller than the incident wavelength is the focus of this work. By use of a supercontinuum laser source we study the diffraction signal of a step especially in the transition region where the step height becomes smaller than the wavelength. Furthermore, the effect of the surface material as well as the polarization state and direction of the incoming laser beam are subjects of the current work. The goal of this project is to become a detailed idea of the diffraction signal depending on the ratio of incoming wavelength to step height and to derive trends according to the aspect ratio and manufacturing related deviations of the steps shape. The results will serve as a basis for the development of an edge and step detection system within a nano-positioning-and-nano-measuring-machine (NPMM).
https://nbn-resolving.org/urn:nbn:de:0287-2015-A003-6
Design und Fertigung eines optofluidischen Messsystems zur kapnometrischen Überwachung. - In: MEMS, Mikroelemente, Systeme, (2015), S. 218-221
Das Technische Auge - dreidimensionale Abtastung des Objektraums. - In: MEMS, Mikroelemente, Systeme, (2015), S. 73-76
The photoluminescence intensity of group III nitrides, nanowires, and heterostructures (NWHs) strongly depends on the environmental H2 and O2 concentration. We used this opto-chemical transducer principle for the realization of a gas detector. To make this technology prospectively available to commercial gas-monitoring applications, a large-scale laboratory setup was miniaturized. To this end the gas-sensitive NWHs were integrated with electro-optical components for optical addressing and read out within a com-pact and robust sensor system. This paper covers the entire realization process of the device from its conceptual draft and optical design to its fabrication and assembly. The applied approaches are verified with intermediate results of profilometric characterizations and optical performance measurements of subsystems. Finally the gas-sensing capabilities of the integrated detector are experimentally proven and optimized.
2D stepping microdrive for hyperspectral imaging. - In: Smart sensors, actuators, and MEMS VII; and cyber physical systems, 2015, 95170K, insges. 10 S.
Investigations on sub-aperture stitching approach for testing freeform optics. - In: Optica, 2015, paper JT5A.12
http://dx.doi.org/10.1364/AOMS.2015.JT5A.12
Freeform and array elements for tunable optics applications. - In: Freeform optics, ISBN 978-1-943580-00-2, (2015), insges. 1 S.
http://dx.doi.org/10.1364/FREEFORM.2015.FW4B.2
Tunable multisegment Si x N y /AlN piezo lenses for wavefront correction. - In: 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), ISBN 978-1-4799-8956-0, (2015), S. 2045-2048
A combined layer structure of aluminium nitride (AIN) and silicon niride (SiN) enables the facrication of multisegment piezo-actuated micro lenses with a percise control of the lens surface. It is demonstrated that these micro lenses offer free asheric deformation of the lens surface and can operate at high repetition rates along with reproducible and precise tunability. The AIN / SiN micro lenses are highly advantageous to be used as wave front filter or for fast focus correction.
http://dx.doi.org/10.1109/TRANSDUCERS.2015.7181358
Two-dimensional stepping drive for hyperspectral systems. - In: MME 2014 - Istanbul, (2014), insges. 4 S.
Method and apparatus for detecting the surface shape of reflective freeform optics. - In: Frontiers in optics, 2014, FW5A.3
http://dx.doi.org/10.1364/FIO.2014.FW5A.3
Analysis of the influence of manufacturing and alignment related errors on an optical tweezer system. - In: International Optical Design Conference 2014, 2014, 92930D, insges. 8. S.
In this work we present the design process as well as experimental results of an optical system for trapping particles in air. For positioning applications of micro-sized objects onto a glass wafer we developed a highly efficient optical tweezer. The focus of this paper is the iterative design process where we combine classical optics design software with a ray optics based force simulation tool. Thus we can find the best compromise which matches the optical systems restrictions with stable trapping conditions. Furthermore we analyze the influence of manufacturing related tolerances and errors in the alignment process of the optical elements on the optical forces. We present the design procedure for the necessary optical elements as well as experimental results for the aligned system.