Frank, Thomas;
Two-axis electrodynamic micropositioning devices. - In: Journal of micromechanics and microengineering, ISSN 1361-6439, Bd. 8 (1998), 2, S. 114-118
http://dx.doi.org/10.1088/0960-1317/8/2/018
Two-axis electrodynamic micropositioning devices. - In: Journal of micromechanics and microengineering, ISSN 1361-6439, Bd. 8 (1998), 2, S. 114-118
http://dx.doi.org/10.1088/0960-1317/8/2/018
Kutchoukov, V.; Philippov, Philipp; Schmidt, Cordt
Electroplating of copper in microstructured silicon wafers. - In: Micro system technologies 98, (1998), S. 737-739
Electroplating of copper in microstructured silicon wafers. - In: Micro system technologies 98, (1998), S. 737-739
Schwesinger, Norbert;
Marufke, Olaf; Stubenrauch, Mike; Hohmann, Michael; Wurziger, Hanns
Modular silicon micro reactors for organic chemistry. - In: Micro system technologies 98, (1998), S. 565-570
Modular silicon micro reactors for organic chemistry. - In: Micro system technologies 98, (1998), S. 565-570
Keoshkeryan, Ruben; Dressler, Lothar; Schwesinger, Norbert
Optimal design of a microfluidic system with piezoactuator for droplets generation. - In: Micro system technologies 98, (1998), S. 551-556
Optimal design of a microfluidic system with piezoactuator for droplets generation. - In: Micro system technologies 98, (1998), S. 551-556
Salim, Riad; Wurmus, Helmut
Flexible microgrippers for manipulation of microstructures. - In: Micro system technologies 98, (1998), S. 263-268
Flexible microgrippers for manipulation of microstructures. - In: Micro system technologies 98, (1998), S. 263-268
Frank, Thomas;
Wurmus, Helmut
A new principle for micro-opto-mechanical scanners. - In: Micro system technologies 98, (1998), S. 177-182
A new principle for micro-opto-mechanical scanners. - In: Micro system technologies 98, (1998), S. 177-182
Pezoldt, Jörg; Stauden, Thomas; Cimalla, Volker; Ecke, Gernot; Romanus, Henry; Eichhorn, Gerd
Growth of SiC layers on (111) Si by solid source molecular beam epitaxy. - In: Silicon carbide, III-nitrides and related materials, (1998), S. 251-254
Growth of SiC layers on (111) Si by solid source molecular beam epitaxy. - In: Silicon carbide, III-nitrides and related materials, (1998), S. 251-254
Ecke, Gernot; Eichhorn, Gerd; Pezoldt, Jörg; Reinhold, C.; Stauden, Thomas; Supplieth, Frank
Deposition of aluminium nitride films by electron cyclotron resonance plasma-enhanced chemical vapour deposition. - In: Surface and coatings technology, ISSN 1879-3347, Bd. 98 (1998), 1/3, S. 1503-1509
https://doi.org/10.1016/S0257-8972(97)00282-X
Deposition of aluminium nitride films by electron cyclotron resonance plasma-enhanced chemical vapour deposition. - In: Surface and coatings technology, ISSN 1879-3347, Bd. 98 (1998), 1/3, S. 1503-1509
https://doi.org/10.1016/S0257-8972(97)00282-X
Frank, Thomas;
Elektrodynamische Mikroantriebe in Silizium-Technik. - In: Motion systems, (1998), S. 135-136
Elektrodynamische Mikroantriebe in Silizium-Technik. - In: Motion systems, (1998), S. 135-136
Bögelsack, Gerhard; Schilling, Cornelius
Joints in nature and technology - comparison and modelling. - In: Motion systems, (1998), S. 61-62
Joints in nature and technology - comparison and modelling. - In: Motion systems, (1998), S. 61-62