Tagungsbeiträge

Mehner, Hannes; Leopold, Steffen; Hoffmann, Martin
Variation des intrinsischen Stressgradienten dünner Aluminiumnitridschichten. - In: Von Bauelementen zu Systemen, (2013), S. 622-625

Dittrich, Lars; Endrödy, Csaba; Hoffmann, Martin;
Mikropumpe mit elektrostatischem Direktantrieb. - In: Von Bauelementen zu Systemen, (2013), S. 512-515

Markweg, Eric; Weinberger, Stefan; Nguyen, Tran Trung; Schädel, Martin; Brodersen, Olaf; Ament, Christoph; Hoffmann, Martin
Mikrolasertracker zur multisensorischen 3D-Koordinatenmessung. - In: Von Bauelementen zu Systemen, (2013), S. 468-471

Grewe, Adrian; Endrödy, Csaba; Fütterer, Richard; Cu-Nguyen, Phuong-Ha; Steiner, S.; Hillenbrand, Matthias; Correns, Martin; Hoffmann, Martin; Linß, Gerhard; Zappe, Hans P.; Seifert, Andreas; Kley, E. B.; Sinzinger, Stefan
Opto-mechanical microsystems for hyperspectral imaging :
Opto-mechanische Mikrosysteme zur hyperspektralen Bildgebung. - In: Von Bauelementen zu Systemen, (2013), S. 139-142

We present approaches and systems for hyperspectral imaging devices. The first approach is based on resonant waveguide gratings. Another two systems employ a hyperchromatic confocal approach for the spectral separation of light. The necessary multiplexing in time is realized by tuneable optics. Here we use fluidic micro lenses as well as diffractive Alvarez-Lohmann Lenses. To increase the resolution of such systems micromechanical stepper actuators with large travel range are designed.

Leopold, Steffen; Pätz, Daniel; Sinzinger, Stefan; Hoffmann, Martin
Tunable micro-lenses based on aluminium nitride membranes :
Adaptive Mikrolinsen basierend auf Aluminiumnitrid Membranen. - In: Von Bauelementen zu Systemen, (2013), S. 173-176

Tunable micro-lenses based on deformable membranes consist of a liquid, whose surface is defined by a pressure chamber and a membrane. If a pressure is applied, the membrane deflects spherically. Thus the liquid within the pressure chamber, which is covered with the membrane, forms a plano-convex lens. Within this contribution aluminium nitride membranes for tunable lenses are investigated. They benefit from long-term-stability and a nearly ideal spherical deformation. For the mechanical and optical characterization we use 500 nm thick membranes with a diameter of 3 mm. For an applied pressure of 20 kPa, we observed membrane delections of up to 64 [my]m and refractive powers between 0 and 25 dpt.