Weinberger, Stefan; Hoffmann, Martin
Aluminum nitride supported 1D micromirror with static rotation angle >11˚. - In: MOEMS and miniaturized systems XII, ISBN 978-0-8194-9385-9, 2013, 86160E, insges. 9 S.
Aluminum nitride supported 1D micromirror with static rotation angle >11˚. - In: MOEMS and miniaturized systems XII, ISBN 978-0-8194-9385-9, 2013, 86160E, insges. 9 S.
Leopold, Steffen; Pätz, Daniel; Knöbber, Fabian; Ambacher, Oliver; Sinzinger, Stefan; Hoffmann, Martin
Tunable cylindrical microlenses based on aluminum nitride membranes. - In: MOEMS and miniaturized systems XII, ISBN 978-0-8194-9385-9, 2013, 861611, insges. 9 S.
Tunable cylindrical microlenses based on aluminum nitride membranes. - In: MOEMS and miniaturized systems XII, ISBN 978-0-8194-9385-9, 2013, 861611, insges. 9 S.
Leopold, Steffen; Müller, Lutz; Kremin, Christoph; Hoffmann, Martin
Online monitoring of the passivation breakthrough during deep reactive ion etching of silicon using optical plasma emission spectroscopy. - In: Journal of micromechanics and microengineering, ISSN 1361-6439, Bd. 23 (2013), 7, 074001, insges. 6 S.
https://doi.org/10.1088/0960-1317/23/7/074001
Online monitoring of the passivation breakthrough during deep reactive ion etching of silicon using optical plasma emission spectroscopy. - In: Journal of micromechanics and microengineering, ISSN 1361-6439, Bd. 23 (2013), 7, 074001, insges. 6 S.
https://doi.org/10.1088/0960-1317/23/7/074001
Wang, Dong; Schönherr, Sven; Ji, Ran; Herz, Andreas; Ronning, Carsten; Schaaf, Peter
Ordered arrays of patterned nanoporous silicon. - In: Journal of micromechanics and microengineering, ISSN 1361-6439, Bd. 23 (2013), 7, 074004, insges. 6 S.
https://doi.org/10.1088/0960-1317/23/7/074004
Ordered arrays of patterned nanoporous silicon. - In: Journal of micromechanics and microengineering, ISSN 1361-6439, Bd. 23 (2013), 7, 074004, insges. 6 S.
https://doi.org/10.1088/0960-1317/23/7/074004
Markweg, Eric; Nguyen, Tran Trung; Ament, Christoph; Hoffmann, Martin; Schädel, Martin; Brodersen, Olaf
Integration of a position photodiode for a micro laser tracker system. - In: Smartsystems integration, ISBN 978-3-8007-3490-0, (2013), insges. 8 S.
Integration of a position photodiode for a micro laser tracker system. - In: Smartsystems integration, ISBN 978-3-8007-3490-0, (2013), insges. 8 S.
Markweg, Eric; Hoffmann, Martin
Optical scanners based on thermo-optical tuning of an integrated-optical waveguide mode. - In: MOEMS and miniaturized systems XII, ISBN 978-0-8194-9385-9, 2013, 86160A, insges. 8 S.
Optical scanners based on thermo-optical tuning of an integrated-optical waveguide mode. - In: MOEMS and miniaturized systems XII, ISBN 978-0-8194-9385-9, 2013, 86160A, insges. 8 S.
Wulfmeier, Hendrik; Albrecht, Daniel; Ivanov, Svetlozar; Fischer, Julian; Grieseler, Rolf; Schaaf, Peter; Ulrich, Sven; Bund, Andreas; Fritze, Holger
Thin film calorimetry - device development and application to lithium ion battery materials. - In: MRS online proceedings library, ISSN 1946-4274, Bd. 1496 (2013), S. 54-59
http://dx.doi.org/10.1557/opl.2013.104
Thin film calorimetry - device development and application to lithium ion battery materials. - In: MRS online proceedings library, ISSN 1946-4274, Bd. 1496 (2013), S. 54-59
http://dx.doi.org/10.1557/opl.2013.104
Albrecht, Daniel; Wulfmeier, Hendrik; Ivanov, Svetlozar; Bund, Andreas; Fritze, Holger
Synthesis of different molybdenum disulfide nanostructures and their applicability in lithium ion batteries with ionic liquid electrolytes. - In: MRS online proceedings library, ISSN 1946-4274, Bd. 1496 (2013), S. 1-6
http://dx.doi.org/10.1557/opl.2013.126
Synthesis of different molybdenum disulfide nanostructures and their applicability in lithium ion batteries with ionic liquid electrolytes. - In: MRS online proceedings library, ISSN 1946-4274, Bd. 1496 (2013), S. 1-6
http://dx.doi.org/10.1557/opl.2013.126
Barrigón, Enrique; Brückner, Sebastian; Supplie, Oliver; Döscher, Henning; Rey-Stolle, Ignacio; Hannappel, Thomas
In situ study of Ge(100) surfaces with tertiarybutylphosphine supply in vapor phase epitaxy ambient. - In: Journal of crystal growth, Bd. 370 (2013), S. 173-176
http://dx.doi.org/10.1016/j.jcrysgro.2012.07.046
In situ study of Ge(100) surfaces with tertiarybutylphosphine supply in vapor phase epitaxy ambient. - In: Journal of crystal growth, Bd. 370 (2013), S. 173-176
http://dx.doi.org/10.1016/j.jcrysgro.2012.07.046
Pudis, Dusan; Suslik, Lubos; Skriniarova, Jaroslava; Kovac, Jaroslav; Kovac, Jaroslav; Kubicova, Ivana; Martincek, Ivan; Hascik, Stefan; Schaaf, Peter
Effect of 2D photonic structure patterned in the LED surface on emission properties. - In: Applied surface science, Bd. 269 (2013), S. 161-165
http://dx.doi.org/10.1016/j.apsusc.2012.10.030
Effect of 2D photonic structure patterned in the LED surface on emission properties. - In: Applied surface science, Bd. 269 (2013), S. 161-165
http://dx.doi.org/10.1016/j.apsusc.2012.10.030