Materials, bearings, and lubricants for nanopositioning. - In: Technisches Messen, ISSN 2196-7113, Bd. 73 (2006), 9, S. 500-510
http://dx.doi.org/10.1524/teme.2006.73.9.500
Analysis of the measurement uncertainties of nanopositioning and nanomeasuring machines (NPM-machines) by means of a new vectorial model approach :
Messunsicherheitsanalyse von Nanopositionier- und Nanomessmaschinen mit Hilfe eines neuen vektoriellen Modellansatzes. - In: Technisches Messen, ISSN 2196-7113, Bd. 73 (2006), 9, S. 465-471
http://dx.doi.org/10.1524/teme.2006.73.9.465
Neue Anwendungen der Nanomessmaschine (NPM-Maschine) durch die Entwicklung nanoskaliger optischer und taktiler Tastsensoren. - In: Technisches Messen, ISSN 2196-7113, Bd. 73 (2006), 9, S. 457-464
http://dx.doi.org/10.1524/teme.2006.73.9.457
A novel plane mirror interferometer without using corner cube reflectors. - In: Measurement science and technology, ISSN 1361-6501, Bd. 17 (2006), 4, S. 746-752
http://dx.doi.org/10.1088/0957-0233/17/4/021
Nanopositionier- und Nanomesstechnik. - In: Ingenieur-Nachrichten, (2005), 2, S. 4
Interferometrischer Sensor und interferometrisches Kalibriersystem für Ultrapräzisions-Anwendungen. - In: Technisches Messen, ISSN 2196-7113, Bd. 72 (2005), 10, S. 566-575
http://dx.doi.org/10.1524/teme.2005.72.10_2005.566
Novel micro interferometer for length measurements. - In: Journal of non-crystalline solids, ISSN 0022-3093, Bd. 338/340 (2004), S. 793-796
http://dx.doi.org/10.1016/j.jnoncrysol.2004.03.093
A nanopositioning and nanomeasuring machine : operation-measured results. - In: Nami-jishu-yu-jingmi-gongcheng, ISSN 1672-6030, Bd. 2 (2004), 2, S. 81-84
An the Institute of Process Measurement and Sensor Technology of Technische Universität Ilmenau, a three-dimensional nanopositioning and nanomeasuring machine (NPM-Machine) has been developed. The Abbe offset-free design provides extra-ordinary accuracy. In the entire positioning and measuring range of 25 mm x 25 mm x 5 mm the interferometric length measurement system reaches a resolution of 0,1 nm and an uncertainty of 5 - 10 nm. The article gives basic information on this nanopositioning and measuring machine, explains its mode of operation and represents measurement results.
Traceable nanometrology with a nanopositioning and nanomeasuring machine. - In: Zhongguo-jixie-gongcheng-xuekan, ISSN 0257-9731, Bd. 25 (2004), 5, S. 399-404
Development of a focus sensor and its integration into the nanopositioning and nanomeasuring machine :
Entwicklung eines Fokussensors und Integration in die Nanopositionier- und Nanomessmaschine. - In: Technisches Messen, ISSN 2196-7113, Bd. 71 (2004), 11, S. 596-602
https://doi.org/10.1524/teme.71.11.596.51377