Thermisches Verhalten von SiCer - ein innovatives Verbundsubstrat für MEMS. - In: MEMS, Mikroelemente, Systeme, (2015), S. 262-265
Design und Fertigung eines optofluidischen Messsystems zur kapnometrischen Überwachung. - In: MEMS, Mikroelemente, Systeme, (2015), S. 218-221
Autonomer Mikrosensor zur Integration von Stoßereignissen. - In: MEMS, Mikroelemente, Systeme, (2015), S. 159-162
In Kieselglas monolithisch integriertes Interferometer. - In: MEMS, Mikroelemente, Systeme, (2015), S. 138-141
Das Technische Auge - dreidimensionale Abtastung des Objektraums. - In: MEMS, Mikroelemente, Systeme, (2015), S. 73-76
The photoluminescence intensity of group III nitrides, nanowires, and heterostructures (NWHs) strongly depends on the environmental H2 and O2 concentration. We used this opto-chemical transducer principle for the realization of a gas detector. To make this technology prospectively available to commercial gas-monitoring applications, a large-scale laboratory setup was miniaturized. To this end the gas-sensitive NWHs were integrated with electro-optical components for optical addressing and read out within a com-pact and robust sensor system. This paper covers the entire realization process of the device from its conceptual draft and optical design to its fabrication and assembly. The applied approaches are verified with intermediate results of profilometric characterizations and optical performance measurements of subsystems. Finally the gas-sensing capabilities of the integrated detector are experimentally proven and optimized.
Ein dreiachsiger oszillierender Mikrotaster für die Koordinatenmesstechnik. - In: MEMS, Mikroelemente, Systeme, (2015), S. 40-43
Plasma-assisted synthesis of hydrogenated TiO 2 for energy storage and conversion. - In: 79th Annual Meeting of the DPG and DPG-Frühjahrstagung (Spring Meeting) of the Condensed Matter Section (SKM) together with the Divisions: History of Physics, Gravitation and Relativity, Microprobes, Theoretical and Mathematical Physics, and Working Groups: Energy, Equal Opportunities, Information, Philosophy of Physics, Physics and Disarmament, young DPG ; March, 15 - 20, 2015, Technische Universität Berlin, 2015, AKE 8.3
Investigation of glass degradation by X-ray photoelectron spectroscopy. - In: 79th Annual Meeting of the DPG and DPG-Frühjahrstagung (Spring Meeting) of the Condensed Matter Section (SKM) together with the Divisions: History of Physics, Gravitation and Relativity, Microprobes, Theoretical and Mathematical Physics, and Working Groups: Energy, Equal Opportunities, Information, Philosophy of Physics, Physics and Disarmament, young DPG ; March, 15 - 20, 2015, Technische Universität Berlin, 2015, O 64.7
Surface analysis of MOVPE-prepared GaP(111)B. - In: 79th Annual Meeting of the DPG and DPG-Frühjahrstagung (Spring Meeting) of the Condensed Matter Section (SKM) together with the Divisions: History of Physics, Gravitation and Relativity, Microprobes, Theoretical and Mathematical Physics, and Working Groups: Energy, Equal Opportunities, Information, Philosophy of Physics, Physics and Disarmament, young DPG ; March, 15 - 20, 2015, Technische Universität Berlin, 2015, O 38.7
In-situ reflection anisotropy spectroscopy study of the MOCVD prepared Si(111) surface. - In: 79th Annual Meeting of the DPG and DPG-Frühjahrstagung (Spring Meeting) of the Condensed Matter Section (SKM) together with the Divisions: History of Physics, Gravitation and Relativity, Microprobes, Theoretical and Mathematical Physics, and Working Groups: Energy, Equal Opportunities, Information, Philosophy of Physics, Physics and Disarmament, young DPG ; March, 15 - 20, 2015, Technische Universität Berlin, 2015, O 20.2