Polster, Tobias; Hoffmann, Martin
Aluminum nitride based 3D, piezoelectric, tactile sensor. - In: Procedia chemistry, ISSN 1876-6196, Bd. 1 (2009), 1, S. 144-147
http://dx.doi.org/10.1016/j.proche.2009.07.036
Aluminum nitride based 3D, piezoelectric, tactile sensor. - In: Procedia chemistry, ISSN 1876-6196, Bd. 1 (2009), 1, S. 144-147
http://dx.doi.org/10.1016/j.proche.2009.07.036
Distelrath, Anika; Jakob, Christine
Investigation of structured electrodeposition of hard chromium coatings. - In: Information technology and electrical engineering - devices and systems, materials and technologies for the future, (2009), S. 379
Investigation of structured electrodeposition of hard chromium coatings. - In: Information technology and electrical engineering - devices and systems, materials and technologies for the future, (2009), S. 379
Schwierz, Frank; Pezoldt, Jörg
Graphene as FET channel material - what are the benefits?. - In: Information technology and electrical engineering - devices and systems, materials and technologies for the future, (2009), S. 223-224
Graphene as FET channel material - what are the benefits?. - In: Information technology and electrical engineering - devices and systems, materials and technologies for the future, (2009), S. 223-224
Stubenrauch, Mike; Schwandt, Morris; Hecht, Siegmar; Hoffmann, Martin
Reliability aspects of mechanical interlocking bond interfaces with nanostructured silicon grass. - In: Collection of papers presented at the Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, ISBN 978-2-355-00009-6, (2009), S. 167-169
Reliability aspects of mechanical interlocking bond interfaces with nanostructured silicon grass. - In: Collection of papers presented at the Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, ISBN 978-2-355-00009-6, (2009), S. 167-169
Michael, Steffen; Brückner, Klemens; Niebelschütz, Florentina; Tonisch, Katja; Schäffel, Christoph
Parameter identification of piezoelectric AlGaN/GaN beam resonators by dynamic measurements. - In: 10th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, 2009, ISBN 978-1-4244-4161-7, (2009), insges. 4 S.
http://dx.doi.org/10.1109/ESIME.2009.4938498
Parameter identification of piezoelectric AlGaN/GaN beam resonators by dynamic measurements. - In: 10th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, 2009, ISBN 978-1-4244-4161-7, (2009), insges. 4 S.
http://dx.doi.org/10.1109/ESIME.2009.4938498
Kremin, Christoph; Leopold, S.; Stubenrauch, Mike; Hoffmann, Martin
Variation von nanostrukturiertem Silicium aus DRIE-Tiefenätzprozessen zur Integration in Si-basierte MEMS. - In: Mikro-Nano-Integration, (2009), insges. 6 S.
Variation von nanostrukturiertem Silicium aus DRIE-Tiefenätzprozessen zur Integration in Si-basierte MEMS. - In: Mikro-Nano-Integration, (2009), insges. 6 S.
Stubenrauch, Mike; Fröber, Ulrike; Fischer, Michael; Kremin, Christoph; Witte, Hartmut; Hoffmann, Martin
Klebe- und klemmfreies Anschlusskonzept für mikrofluidische Systeme mittels nanostrukturierter Oberflächen. - In: Mikro-Nano-Integration, (2009), insges. 2 S.
Klebe- und klemmfreies Anschlusskonzept für mikrofluidische Systeme mittels nanostrukturierter Oberflächen. - In: Mikro-Nano-Integration, (2009), insges. 2 S.
Brückner, Klemens; Niebelschütz, Florentina; Tonisch, Katja; Stephan, Ralf; Cimalla, Volker; Ambacher, Oliver; Hein, Matthias
Resonant piezoelectric ALGaN/GaN MEMS sensors in longitudinal mode operation. - In: IEEE 22nd International Conference on Micro Electro Mechanical Systems, 2009, ISBN 978-1-4244-2977-6, (2009), S. 927-930
http://dx.doi.org/10.1109/MEMSYS.2009.4805536
Resonant piezoelectric ALGaN/GaN MEMS sensors in longitudinal mode operation. - In: IEEE 22nd International Conference on Micro Electro Mechanical Systems, 2009, ISBN 978-1-4244-2977-6, (2009), S. 927-930
http://dx.doi.org/10.1109/MEMSYS.2009.4805536
Stubenrauch, Mike; Schwandt, Morris; Hecht, Siegmar; Kremin, Christoph; Fischer, Michael; Hoffmann, Martin
Zuverlässigkeitsaspekte bei Nanoklettverschlüssen. - In: Mikro-Nano-Integration, (2009), insges. 3 S.
Zuverlässigkeitsaspekte bei Nanoklettverschlüssen. - In: Mikro-Nano-Integration, (2009), insges. 3 S.
Fischer, Michael; Bartsch de Torres, Heike; Hoffmann, Martin; Müller, Jens; Pawlowski, B.; Barth, S.
Silizium-Keramik-Verbundsubstrat eine neue Plattform für die Mikro-Nano-Integration. - In: Mikro-Nano-Integration, (2009), insges. 3 S.
Silizium-Keramik-Verbundsubstrat eine neue Plattform für die Mikro-Nano-Integration. - In: Mikro-Nano-Integration, (2009), insges. 3 S.