Radius and roundness measurement of micro spheres based on a set of AFM surface scans. - In: Measurement science and technology, ISSN 1361-6501, Bd. 32 (2021), 4, 044005, S. 1-11
Micro coordinate measuring machines have been developed for the traceable characterisation of small complex parts, due to the demand in research and industry. These machines require geometrically well characterised probing spheres of ever smaller radii. Currently, there is no established procedure for the measurement of such spheres below radii of 500 [my]m. In this paper we, therefore, propose and investigate an approach which is based on a set of AFM surface scans in conjunction with a stitching algorithm. The strategy was implemented on a nano measuring machine and investigated on a ruby sphere with a radius of 150 [my]m. Although the strategy can generally be applied to the characterisation of a full sphere, we limit ourselves to the measurement of one greate circle (equator). The technique enables the measurement of micro spheres with a high lateral and vertical resolution. The mean radius of the ruby sphere was measured with a standard deviation of 3.7 nm over 6 repetitions. As our experiments have shown, the measurement procedure is at the moment mainly influenced by the shape of the AFM tip which requires further attention.
https://doi.org/10.1088/1361-6501/abcff4
Coordinate transformation and its uncertainty under consideration of a non-orthogonal coordinate base. - In: Measurement science and technology, ISSN 1361-6501, Bd. 32 (2021), 4, 045001, insges. 6 S.
Nanopositioning and nanomeasuring machines are 3D coordinate measuring systems with nanometer precision at measurement volumes in the cubic centimeter range. The coordinate base is formed by an interferometer system with a common mirror corner. The orthogonality deviations of the mirror corner require a coordinate transformation of the measuring axes. The uncertainty of the coordinate transformation must be taken into account in the overall measurement uncertainty budget. Starting from a complete transformation model, the result of model simplications on the transformation behaviour is analysed and discussed.
https://doi.org/10.1088/1361-6501/aba3f5
Grundlegende Untersuchungen zur Entwicklung von fünfachsigen Nanopositioniermaschinen für Mess- und Fertigungszwecke. - In: Jahrbuch Optik und Feinmechanik, ISSN 0075-272X, Bd. 66 (2020), S. 67-92
Development of a cantilever calibration device :
Entwicklung einer Cantileverkalibriereinrichtung. - In: Technisches Messen, ISSN 2196-7113, Bd. 87 (2020), 10, S. 622-629
Das Messen kleiner Kräfte ist in vielen wissenschaftlichen Bereichen, wie beispielsweise der Physik oder Biologie, erforderlich. Bei Kräften im Bereich von Nanonewton werden typischerweise AFM-Cantilever als Kraftsensoren genutzt. Die Steifigkeit des Cantilevers muss bekannt sein um von der Durchbiegung auf die Kraft zu schließen. Aufgrund von Fertigungsabweichungen kommt es zu einer großen Streuung der Cantileversteifigkeit. Für eine präzise Kraftmessung muss daher jeder einzelne Cantilever kalibriert werden. Das derzeit genauste Kalibrierverfahren basiert darauf die Kraft-Weg-Kennlinie des Cantilevers statisch zu messen und ihren Anstieg zu bestimmen. In diesem Artikel wird ein neuartiger Prüfstand beschrieben welcher nach diesem Prinzip arbeitet. Ein Interferometer misst die Position und eine neuartige, eingelenkige Wägezelle die Kraft des Cantilevers. Die Wägezelle wurde in zwei unabhängigen Experimenten mit übereinstimmendem Ergebnis kalibriert. Abschließend werden die Messergebnisse einer Cantileverkalibrierung präsentiert.
https://doi.org/10.1515/teme-2020-0064
Direct polymer microcantilever fabrication from free-standing dry film photoresists. - In: Journal of micromechanics and microengineering, ISSN 1361-6439, Bd. 30 (2020), 9, 095012, S. 1-13
https://doi.org/10.1088/1361-6439/ab9e4c
Progress of nanopositioning and nanomeasuring machines for cross-scale measurement with sub-nanometre precision. - In: Measurement science and technology, ISSN 1361-6501, Volume 31 (2020), number 8, 085005, Seite 1-8
https://doi.org/10.1088/1361-6501/ab848c
Nanopositioning and nanomeasuring machine for multi-sensor applications. - In: Measuring Equipment and Metrology, ISSN 2617-846X, Bd. 81 (2020), 2, S. 17-24
In micro- and nanotechnology, the demands placed on measurement technology are increasing. The structures to be measured are becoming more complex with smaller structure widths, increasingly larger surface regions, and thousands of inspection features. To solve the problems, it has become desirable and even necessary to combine multi-sensor technology with high precision nanopositioning and nano measuring technology. The Nanopositioning and Nanomeasuring Machine NMM-1 with a measuring range of 25 mm × 25 mm × 5 mm and sub-nanometer resolution allow the application of several optical, tactile and atomic force probes. The combination of several sensor technologies in a multi-sensor approach for application with the NMM-1 is demonstrated.
https://doi.org/10.23939/istcmtm2020.02.017
Structural and local electronic properties of clean and Li-intercalated graphene on SiC(0001). - In: Surface science, ISSN 1879-2758, Bd. 699 (2020), 121638
https://doi.org/10.1016/j.susc.2020.121638
The revised International System of Units (SI) and the resulting new potentials :
Das erneuerte Internationale Einheitensystem (SI) und seine Potenziale. - In: Technisches Messen, ISSN 2196-7113, Bd. 87 (2020), 4, S. 223-225
Editorial
https://doi.org/10.1515/teme-2020-0007
New ways to calibrate E2 mass standards and realization of forces up to 10 N :
Neue Wege zur Kalibrierung von E2-Massenormalen und Darstellung von Kräften bis 10 N. - In: Technisches Messen, ISSN 2196-7113, Bd. 87 (2020), 4, S. 280-293
https://doi.org/10.1515/teme-2019-0143