Schwesinger, Norbert; Frank, Thomas
A static micromixer built up in silicon. - In: Micromachined devices and components, (1995), S. 150-155
A static micromixer built up in silicon. - In: Micromachined devices and components, (1995), S. 150-155
Gerlach, Torsten; Wurmus, Helmut
Working principle and performance of the dynamic micropump. - In: IEEE micro electro mechanical systems, (1995), S. 221-226
Working principle and performance of the dynamic micropump. - In: IEEE micro electro mechanical systems, (1995), S. 221-226
Cimalla, Volker;
Structural evolution of rapid thermal carbonized Si surfaces. - In: Evolution of thin film and surface structure and morphology, (1995), S. 33-38
Structural evolution of rapid thermal carbonized Si surfaces. - In: Evolution of thin film and surface structure and morphology, (1995), S. 33-38
Nennewitz, Olaf; Spieß, Lothar; Breternitz, Volkmar
Ohmic contacts to p-type 6H-silicon carbide. - In: Applied surface science, Bd. 91 (1995), 1/4, S. 347-351
http://dx.doi.org/10.1016/0169-4332(95)00144-1
Ohmic contacts to p-type 6H-silicon carbide. - In: Applied surface science, Bd. 91 (1995), 1/4, S. 347-351
http://dx.doi.org/10.1016/0169-4332(95)00144-1
Pezoldt, Jörg; Stottko, B.; Kupris, Gerald; Ecke, Gernot
Sputtering effects in hexagonal silicon carbide. - In: Materials science and engineering. Solid state materials for advanced technology / American Society for Metals. - New York, NY [u.a.] : Elsevier, 1988- , ISSN: 1873-4944 , ZDB-ID: 1492109-1, ISSN 1873-4944, Bd. 29 (1995), 1/3, S. 94-98
http://dx.doi.org/10.1016/0921-5107(94)04005-O
Sputtering effects in hexagonal silicon carbide. - In: Materials science and engineering. Solid state materials for advanced technology / American Society for Metals. - New York, NY [u.a.] : Elsevier, 1988- , ISSN: 1873-4944 , ZDB-ID: 1492109-1, ISSN 1873-4944, Bd. 29 (1995), 1/3, S. 94-98
http://dx.doi.org/10.1016/0921-5107(94)04005-O
Pezoldt, Jörg;
Are polytype transitions possible during boron diffusion?. - In: Materials science and engineering. Solid state materials for advanced technology / American Society for Metals. - New York, NY [u.a.] : Elsevier, 1988- , ISSN: 1873-4944 , ZDB-ID: 1492109-1, ISSN 1873-4944, Bd. 29 (1995), 1/3, S. 99-104
http://dx.doi.org/10.1016/0921-5107(94)04006-P
Are polytype transitions possible during boron diffusion?. - In: Materials science and engineering. Solid state materials for advanced technology / American Society for Metals. - New York, NY [u.a.] : Elsevier, 1988- , ISSN: 1873-4944 , ZDB-ID: 1492109-1, ISSN 1873-4944, Bd. 29 (1995), 1/3, S. 99-104
http://dx.doi.org/10.1016/0921-5107(94)04006-P
Cimalla, Volker; Karagodina, K. V.; Pezoldt, Jörg; Eichhorn, Gerd
Growth of thin [beta]-SiC layers by carbonization of Si surfaces by rapid thermal processing. - In: Materials science and engineering. Solid state materials for advanced technology / American Society for Metals. - New York, NY [u.a.] : Elsevier, 1988- , ISSN: 1873-4944 , ZDB-ID: 1492109-1, ISSN 1873-4944, Bd. 29 (1995), 1/3, S. 170-175
http://dx.doi.org/10.1016/0921-5107(94)04047-8
Growth of thin [beta]-SiC layers by carbonization of Si surfaces by rapid thermal processing. - In: Materials science and engineering. Solid state materials for advanced technology / American Society for Metals. - New York, NY [u.a.] : Elsevier, 1988- , ISSN: 1873-4944 , ZDB-ID: 1492109-1, ISSN 1873-4944, Bd. 29 (1995), 1/3, S. 170-175
http://dx.doi.org/10.1016/0921-5107(94)04047-8
Zöllner, Jens-Peter; Cimalla, Volker; Pezoldt, Jörg
RTP - temperature monitoring by means of oxidation. - In: Journal of non-crystalline solids, ISSN 0022-3093, Bd. 187 (1995), S. 23-28
http://dx.doi.org/10.1016/0022-3093(95)00111-5
RTP - temperature monitoring by means of oxidation. - In: Journal of non-crystalline solids, ISSN 0022-3093, Bd. 187 (1995), S. 23-28
http://dx.doi.org/10.1016/0022-3093(95)00111-5
Kupris, Gerald; Rößler, Hans; Ecke, Gernot; Hofmann, Siegfried
Interpretation of sputter depth profiles by mixing simulations. - In: Fresenius' journal of analytical chemistry, ISSN 1432-1130, Bd. 353 (1995), 3/4, S. 307-310
http://dx.doi.org/10.1007/BF00322057
Interpretation of sputter depth profiles by mixing simulations. - In: Fresenius' journal of analytical chemistry, ISSN 1432-1130, Bd. 353 (1995), 3/4, S. 307-310
http://dx.doi.org/10.1007/BF00322057
Wöhner, Thomas; Ecke, Gernot; Rößler, Hans; Hofmann, Siegfried
Simulation of sputter-induced roughness for depth profiling of thin film structures. - In: Fresenius' journal of analytical chemistry, ISSN 1432-1130, Bd. 353 (1995), 3/4, S. 447-449
http://dx.doi.org/10.1007/BF00322086
Simulation of sputter-induced roughness for depth profiling of thin film structures. - In: Fresenius' journal of analytical chemistry, ISSN 1432-1130, Bd. 353 (1995), 3/4, S. 447-449
http://dx.doi.org/10.1007/BF00322086