Kretzer, Olaf; Lenk, Gerald; Wesch, Werner; Gunst, Ullrich
SIMS-characterization of ultra shallow boron-profiles after BF2+- and B+-low-energy-implantation in silicon. - In: Fresenius' journal of analytical chemistry, ISSN 1432-1130, Bd. 349 (1994), 1, S. 184-186
Im Titel ist "2" tiefgestellt, "+" hochgestellt
http://dx.doi.org/10.1007/BF00323265
SIMS-characterization of ultra shallow boron-profiles after BF2+- and B+-low-energy-implantation in silicon. - In: Fresenius' journal of analytical chemistry, ISSN 1432-1130, Bd. 349 (1994), 1, S. 184-186
Im Titel ist "2" tiefgestellt, "+" hochgestellt
http://dx.doi.org/10.1007/BF00323265
Mann, Dieter; Eicke, Axel; Bilger, G.; Hummel, Wolf Joachim; Spieß, Lothar
Complex solid state physical investigations of metal layers on plastics. - In: Fresenius' journal of analytical chemistry, ISSN 1432-1130, Bd. 349 (1994), 1, S. 237
http://dx.doi.org/10.1007/BF00323293
Complex solid state physical investigations of metal layers on plastics. - In: Fresenius' journal of analytical chemistry, ISSN 1432-1130, Bd. 349 (1994), 1, S. 237
http://dx.doi.org/10.1007/BF00323293
Liebscher, Heinz; Kutzschbach, Peter
Möglichkeiten und Grenzen der Kombination von Metallabscheidung und -auflösung in Kreislaufsystemen. - In: Umweltgerechte Galvano- und Oberflächentechnik, (1994), S. 106-112
Möglichkeiten und Grenzen der Kombination von Metallabscheidung und -auflösung in Kreislaufsystemen. - In: Umweltgerechte Galvano- und Oberflächentechnik, (1994), S. 106-112
Blödner, Ralph-Uwe; Presia, Michael; Gille, Peter
Comparison of two approaches to forced convection in crystal growth of II-VI compounds by THM. - In: Advanced materials for optics and electronics, ISSN 1099-0712, Bd. 3 (1994), 1/6, S. 233-238
http://dx.doi.org/10.1002/amo.860030133
Comparison of two approaches to forced convection in crystal growth of II-VI compounds by THM. - In: Advanced materials for optics and electronics, ISSN 1099-0712, Bd. 3 (1994), 1/6, S. 233-238
http://dx.doi.org/10.1002/amo.860030133
Nennewitz, Olaf; Schmidt, H.; Pezoldt, Jörg; Stauden, Thomas; Schawohl, Jens; Spieß, Lothar
X-ray diffraction analysis of RTP-annealed thin ZnO films. - In: Thin films, (1994), S. 666-669
X-ray diffraction analysis of RTP-annealed thin ZnO films. - In: Thin films, (1994), S. 666-669
Nennewitz, Olaf; Schmidt, H.; Pezoldt, Jörg; Stauden, Thomas; Schawohl, Jens; Spieß, Lothar
Rapid thermal annealing of thin ZnO films. - In: Physica status solidi. Applications and materials science. - Weinheim : Wiley-VCH, 2005- , ISSN: 1862-6319 , ZDB-ID: 1481091-8, ISSN 1862-6319, Bd. 145 (1994), 2, S. 283-288
http://dx.doi.org/10.1002/pssa.2211450208
Rapid thermal annealing of thin ZnO films. - In: Physica status solidi. Applications and materials science. - Weinheim : Wiley-VCH, 2005- , ISSN: 1862-6319 , ZDB-ID: 1481091-8, ISSN 1862-6319, Bd. 145 (1994), 2, S. 283-288
http://dx.doi.org/10.1002/pssa.2211450208
Schwesinger, Norbert; Sändig, Torsten; Salonen, Risto; Zöppig, Veit
The development of a PECVD-technology for Si3N4-films with low mechanical stress. - In: Micro-system technologies '94, (1994), S. 1133-1135
Im Titel sind "3" und "4" tiefgestellt
The development of a PECVD-technology for Si3N4-films with low mechanical stress. - In: Micro-system technologies '94, (1994), S. 1133-1135
Im Titel sind "3" und "4" tiefgestellt
Schwesinger, Norbert;
Burgold, Jörg; Ackermann, Holger
Piezoelectric micropumps based on a new deposition technology for ZnO-films. - In: Micro-system technologies '94, (1994), S. 1035-1044
Piezoelectric micropumps based on a new deposition technology for ZnO-films. - In: Micro-system technologies '94, (1994), S. 1035-1044
Gerlach, Torsten;
A simple micropump employing dynamic passive valves made in silicon. - In: Micro-system technologies '94, (1994), S. 1025-1034
A simple micropump employing dynamic passive valves made in silicon. - In: Micro-system technologies '94, (1994), S. 1025-1034
Harutjunjan, Michael; Schwesinger, Norbert
Optimization of the shape of piezoelectric microstructures. - In: Micro-system technologies '94, (1994), S. 939-948
Optimization of the shape of piezoelectric microstructures. - In: Micro-system technologies '94, (1994), S. 939-948