Combination of high-speed surface scanning and tactile 3-D coordinate measurement on theb basis of advanced mechatronic and control concepts. - In: Proceedings of: Control of precision systems, ISBN 978-1-88770-653-7, (2010), S. 40-44
Investigation of the metrological properties of a 3-D microprobe with optical detection system. - In: Instrumentation, metrology, and standards for nanomanufacturing IV, ISBN 978-0-8194-8263-1, 2010, 77670V, insges. 10 S.
Dimensional measurements of microstructures with uncertainties below 50nm require both nanopositioning and nanomeasuring machines (NPMMs) as well as appropriate microprobes. This paper introduces a novel 3-D tactile microprobe system developed at the Ilmenau University of Technology, Institute of Process Measurement and Sensor Technology, and contains an analysis of its metrological characteristics. - This microprobe system uses a silicon membrane to induce the measurement force and to operate as the damping system for the stylus. This damping is entirely brought about by internal friction. An optical detection system measures the deflection of the membrane and thus of the stylus. The optical detection system uses a single laser beam, focused on the backside of the silicon membrane. The reflected beam is split, with one part being used to measure the tilt about the x- and y-axes and the other part being fed back into an interferometer for deflection measurement in the z-direction. Thus, the deflection of the membrane can be measured with sub-nanometre resolution. An NPMM was used to analyse the metrological characteristics of the microprobe system and to calibrate it. This paper focuses on a detailed analysis of the three-dimensional reproducibility for point measurements by obtaining and evaluating a directional response pattern. This pattern is then compared to the behaviour of other microprobe systems. Furthermore, the work shows that the microprobe system can be applied successfully to scanning measurements and satisfactory results obtained. These results indicate that the microprobe system is well-suited for universal measurement tasks in dimensional metrology.
High precission optical position sensor for electromagnetic force compensated balances. - In: IMEKO TC3 & TC5 & TC22 International Conference, (2010), S. 91-94
Vacuum transfer system for loading the Sartorius prototype mass comparator CCL1007. - In: IMEKO TC3 & TC5 & TC22 International Conference, (2010), S. 77-80
Comparison of different load changers for EMFC-balances. - In: IMEKO TC3 & TC5 & TC22 International Conference, (2010), S. 65-68
Parametric mechatronic model of a load cell with electromagnetic force compensation. - In: IMEKO TC3 & TC5 & TC22 International Conference, (2010), S. 29-32
Determining magnetic properties of mass standards by using the susceptometer method :
Bestimmung magnetischer Eigenschaften von Massenormalen mit der Suszeptometermethode. - In: Sensoren und Messsysteme 2010, (2010), S. 645-649
Metrology and measurement uncertainty of nanopositioning- and nanomeasuring machines :
Metrologie und Messunsicherheit von Nanopositionier- und Nanomessmaschinen. - In: Sensoren und Messsysteme 2010, (2010), S. 474-477
Development of nanomeasuring and nanopositioning machines. - In: Sensoren und Messsysteme 2010, (2010), S. 19-23
Three-dimensional nanopositioning and nanomeasuring machine with a resolution of 0.1 nm. - In: Optoelectronics, instrumentation and data processing, ISSN 1934-7944, Bd. 46 (2010), 4, S. 318-323
The paper describes traceable nanometrology based on a nanopositoning machine with integrated nanoprobes. The operation of a high-precision long-range three-dimensional nanopositioning and nanomeasuring machine (NMM-1) having a resolution of 0.1 nm over the positioning and measuring range of 25 x 25 x 5 mm is explained. Various developed probe systems have been integrated into the NMM-1 machine, including a focus sensor, a white light sensor, and tactile nanoprobes. Single-beam, double-beam and triple-beam interferometers are installed into the NMM-1 machine to measure and control the six degrees of freedom. Measured results are presented.
http://dx.doi.org/10.3103/S8756699010040035