Nanomeasuring and nanopositioning engineering. - In: Measurement, Bd. 43 (2010), 9, S. 1099-1105
The paper describes traceable nanometrology based on a nanopositioning machine with integrated nanoprobes. The operation of a high-precision long range three-dimensional nanopositioning and nanomeasuring machine (NPM-Machine) having a resolution of 0,1 nm over the positioning and measuring range of 25 mm x 25 mm x 5 mm is explained. An Abbe offset-free design of three miniature plan mirror interferometers and applying a new concept for compensating systematic errors resulting from mechanical guide systems provide very small uncertainties of measurement. The NPM-Machine has been developed by the Institute of Process Measurement and Sensor Technology of the Technische Universität Ilmenau and manufactured by the SIOS Messtechnik GmbH Ilmenau. The machines are operating successfully in several German and foreign research institutes including the Physikalisch-Technische Bundesanstalt (PTB), Germany. The integration of several, optical and tactile probe systems and nanotools makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and wafer inspection, nanostructuring, biotechnology and genetic engineering as well as measuring mechanical precision workpieces, precision treatment and for engineering new material. Various developed probe systems have been integrated into the NPM-Machine. The measurement results of a focus sensor, metrological AFM, white light sensor and tactile stylus probes are presented. Single beam-, double beam- and triple beam interferometers built in the NPM-Machine for six degrees of freedom measurements are described.
http://dx.doi.org/10.1016/j.measurement.2010.04.008
Herausforderungen und Grenzen der interferometrischen Präzisionsmesstechnik. - In: Jahrbuch Optik und Feinmechanik, ISSN 0075-272X, Bd. 56 (2010), S. 1-8
First results of an interferometric controlled planar positioning system for 100 mm zerodur slider. - In: Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, (2010), S. 457-461
3-D microprobe with optical detection system. - In: Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, (2010), S. 104-107
Limitations of precision length measurements based on interferometers. - In: Measurement, Bd. 43 (2010), 5, S. 652-658
The most important principles, the basis and operation of heterodyne and homodyne interferometers are discussed. Their benefits and limitations are covered based on a metrological analysis. The resolution of interferometers can be determined by calculating the smallest resolvable distance increment. Also, it is shown here how the Abbe comparator principle can be fulfilled in all three measuring dimensions by using interferometers. Other factors in addition to the Abbe errors are discussed which affect the measurement uncertainty of interferometric length measurements.
http://dx.doi.org/10.1016/j.measurement.2009.12.030
Workbench for the nano world : developing nanopositioning machines with dSPACE tools. - In: dSpace magazine, (2009), 1, S. 20-23
Vorteile bei der Bestimmung dynamischer und statischer Parameter von Oberflächentasttemperaturfühlern durch die Verwendung einer mechanischen Aufsetzvorrichtung. - In: Temperatur 2009, (2009), S. 227-232
Ermittlung des Einflusses von Verunreinigungen auf das thermometrische Fixpunktmaterial Zink. - In: Temperatur 2009, (2009), S. 257-264
Vergleich von arithmetrischen Methoden zur Bestimmung der Fixpunkttemperatur aus Temperaturverläufen. - In: Temperatur 2009, (2009), S. 277-286
Zur Bestimmung von Phasenumwandlungstemperaturen Tph aus gemessenen Plateauverläufen können unterschiedliche mathematische Methoden angewendet werden. Abhängig von der zum Einsatz kommenden Methode und dem zeitlichen Verlauf der Phasenumwandlung ergeben sich hierbei unterschiedliche systematische Abweichungen und Reproduzierbarkeiten der ermittelten Temperaturen Tph. Da dies insbesondere bei der Auswertung von Phasenumwandlungen in kleinen Fixpunktzellen deutlich wird, wurden Schmelz- und Erstarrungsvorgänge von Zink unterschiedlicher Reinheit in miniaturisierten Fixpunktzellen aufgezeichnet. Ihre zeitlichen Temperaturverläufe wurden mit fünf unterschiedlichen Auswertemethoden analysiert, was einen Vergleich der Methoden anhand der errechneten scheinbaren Phasenumwandlungstemperaturen ermöglicht.
Limitations of precision length measurements based on interferometers. - In: Fundamental and applied metrology, ISBN 978-963-88410-0-1, (2009), S. 1915-1919